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In-situ characterization method and device for optical-electric excitation electron emission

An electron emission and electron emission cathode technology, which is used in measurement devices, material excitation analysis, material analysis using wave/particle radiation, etc. , to achieve the effect of a wide range of applications

Active Publication Date: 2019-05-31
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for the electron emission behavior under the action of the optical field and the optical-electric co-excitation field, the existing technology has been difficult to meet the in-situ analysis requirements for the realization of the in-situ electron emission behavior and its physical characteristics and mechanism.

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  • In-situ characterization method and device for optical-electric excitation electron emission
  • In-situ characterization method and device for optical-electric excitation electron emission
  • In-situ characterization method and device for optical-electric excitation electron emission

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Embodiment 1

[0048] An in-situ characterization method for photo-electrically excited electron emission through high-resolution electron microscope, in-situ probe electrical test structure, light field focusing structure, Raman spectrum test system, photoelectron emission / field emission microscope and electron emission spectrum The instrument is characterized by the following steps:

[0049] (1) An in-situ electron emission measurement structure composed of a nano-structured electron emission cathode 10 and a micro-nano probe electron emission anode 22 is set; the nano-structured cathode is a composite structure of upright few layers of graphene and gold nanoparticles; the anode is high Melting point metal tungsten micro-nano probe;

[0050] (2) Set the in-situ electron emission structure to a vacuum higher than 5×10 -4 Pa within 30 of the high-resolution electron microscope;

[0051] (3) The scanning laser arm 43 of the light field focusing structure 40 is set in the vacuum cavity 32 of the hi...

Embodiment 2

[0063] Such as Image 6 Shown is a schematic diagram of the connection of an in-situ characterization device for photo-electric co-excited electron emission; Figure 7 As shown, a partial three-dimensional schematic diagram of an in-situ characterization device for photo-electric co-excited electron emission is given. Such as Figure 8 As shown, the photo-electrically excited nanostructured electron emission in-situ characterization device photograph taken from inside a high-resolution electron microscope is given. The parts in the photo and Figure 7 The part of the three-dimensional diagram shown corresponds to that.

[0064] Such as Figure 6-Figure 8 As shown, the device for in-situ characterization of photo-electrically excited electron emission includes a nano-structured electron emission cathode 10, an in-situ probe electrical test structure 20, a high-resolution electron microscope 30, a light field focusing structure 40, and a Raman spectrometer 45. Among them, a metal ...

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Abstract

The invention discloses an in-situ characterization method for optical-electric excitation electron emission. In a vacuum cavity of a high-resolution electron microscope, a micro-nano probe electrodeis used as an in-situ electric field excitation lead-in component, and an optical focusing structure is used as an in-situ optical field excitation lead-in component. In the electron emission process,a high-resolution electron microscope, a Raman spectrometer, a photoelectron emission / field emission microscope and an electron emission spectrometer are adopted to analyze the real-time morphology,structure, material composition and temperature of a material and the space and energy distribution of electron emission in situ. The invention also discloses an in-situ characterization device for electric excitation electron emission, and the device comprises the high-resolution electron microscope, the in-situ probe electrical test structure, a light field focusing structure, the Raman spectrometer, the photoelectron emission / field emission microscope and the electron emission spectrometer. The method and device of the invention can achieve the in-situ measurement of the electron emission process and the physical characteristics of the nano-structure material under the action of excitation in an optical field and the joint excitation of optical-electric fields.

Description

Technical field [0001] The invention relates to the technical field of micro-nano in-situ characterization, in particular to an in-situ characterization method for photo-electrically excited electron emission, and more to an in-situ characterization device for photo-electrically excited electron emission. Background technique [0002] Existing free electron emission in-situ characterization technologies are all geared to the electron emission behavior of materials under the action of a single external electric field, which can obtain in-situ information on changes in the structure and morphology of the material during the electron emission process. in "Journal of Chinese Electron Microscopy Society" In the 5th issue 414-420, 2018, Liu Shikai et al. "Using coaxial electronic holography to quantitatively characterize the charge distribution in nanowires in situ", using the electric field to image the charge distribution in silicon carbide nanowires Measurement of field emission per...

Claims

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Application Information

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IPC IPC(8): G01N21/65G01N23/2208G01N23/225G01N23/2251G01N23/227G01N23/2273B82Y35/00B82Y40/00
Inventor 沈岩邓少芝陈焕君许宁生陈军佘峻聪
Owner SUN YAT SEN UNIV
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