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Aluminum oxide for chemical mechanical polishing liquid and preparation method of aluminum oxide

A technology of chemical machinery and preparation technology, applied in the direction of alumina/aluminum hydroxide, aluminate/aluminum oxide/aluminum hydroxide purification, and other chemical processes, to achieve good polishing stability, simple preparation process, and wide source of raw materials Effect

Active Publication Date: 2019-06-11
湖南恒源精密陶瓷有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The gel is dried at low temperature in a vacuum state to obtain a loose xerogel, and then calcined at a high temperature to obtain nano-alumina powder; the emulsification method is to disperse one of the two incompatible solutions in the other in the form of droplets The emulsion is formed in the phase, and then reacts in the tiny droplets to form oxides or hydroxides. Although there are many methods for preparing alumina, few of them use kaolin ore as raw material to prepare alumina powder and use it in chemical industry. Mechanical polishing field

Method used

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  • Aluminum oxide for chemical mechanical polishing liquid and preparation method of aluminum oxide
  • Aluminum oxide for chemical mechanical polishing liquid and preparation method of aluminum oxide
  • Aluminum oxide for chemical mechanical polishing liquid and preparation method of aluminum oxide

Examples

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Effect test

Embodiment 1

[0043] A process for preparing aluminum oxide for chemical mechanical polishing fluid, comprising the steps of:

[0044] (1) Pulping and grading to obtain magnetic separation materials: Coarsely grind kaolinite, mix slurry, and perform sand removal and particle size classification in a cyclone. The mass ratio of the slurry mix is ​​kaolin after coarse grinding: dispersant: water =0.05:0.001:1, the stirring speed of mixing slurry is 500r / min, the stirring time is 1h, the content of kaolin with the particle size less than 3mm is greater than 90%, and the raw material for magnetic separation is obtained.

[0045] (2) Gradient magnetic separation to remove iron and titanium: background magnetic field strength 1.5*10 4 Oe, flow rate 1cm / s; magnetization period 3min, so that the titanium content is lower than 0.3wt.%, and the iron content is lower than 0.2wt.%.

[0046] (3) Roasting whitening and simple phase transition: dehydration, drying, roasting, roasting temperature 800 o C,...

Embodiment 2

[0056] 1. A process for preparing aluminum oxide for chemical mechanical polishing fluid, comprising the steps of:

[0057] (1) Pulping and grading to obtain magnetic separation materials: Coarsely grind kaolinite, mix slurry, and perform sand removal and particle size classification in a cyclone. The mass ratio of the slurry mix is ​​kaolin after coarse grinding: dispersant: water =(0.1):(0.005):1, the mixing speed of slurry is 650r / min, the stirring time is 2h, the content of kaolin with a particle size of less than 3mm is greater than 90%, and the raw material for magnetic separation is obtained.

[0058] (2) Gradient magnetic separation to remove iron and titanium: background magnetic field strength 1.5*10 4 Oe, flow rate 1.5cm / s; magnetization period 5.5min, so that the titanium content is lower than 0.3wt.%, and the iron content is lower than 0.2wt.%.

[0059] (3) Roasting whitening and simple phase transition: dehydration, drying, roasting, roasting temperature 950 o ...

Embodiment 3

[0066] A process for preparing aluminum oxide for chemical mechanical polishing fluid, comprising the steps of:

[0067] (1) Pulping and grading to obtain magnetic separation materials: Coarsely grind kaolinite, mix slurry, and perform sand removal and particle size classification in a cyclone. The mass ratio of the slurry mix is ​​kaolin after coarse grinding: dispersant: water =0.15:0.01:1, the mixing speed of slurry is 800r / min, the stirring time is 3h, the content of kaolin with the particle size less than 3mm is greater than 90%, and the raw material for magnetic separation is obtained.

[0068] (2) Gradient magnetic separation to remove iron and titanium: background magnetic field strength 1.5*10 4 Oe, flow rate 2cm / s; magnetization period 8min, so that the titanium content is lower than 0.3wt.%, and the iron content is lower than 0.2wt.%.

[0069] (3) Roasting whitening and simple phase transition: dehydration, drying, roasting, roasting temperature 1100 o C, heating ...

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Abstract

The invention provides aluminum oxide for chemical mechanical polishing liquid and a preparation method of the aluminum oxide. Alpha-aluminum oxide particles in the polishing solution are obtained bypurification of kaolinite, wherein purity of aluminum oxide particles is greater than 99 wt%, the Moh's hardness is 9.1, the particle size is concentrated in a range of 0.5+ / -0.25 microns, and D97 isless than or equal to 1 micron. The preparation process is simple, raw material sources are wide, cost performance of products is high, and the preparation process can be widely applied to various industries and fields and can meet (chemical mechanical polishing) CMP polishing requirements.

Description

technical field [0001] The invention relates to an alumina used in a chemical mechanical polishing liquid and a preparation method thereof, more precisely, relates to a method for obtaining alumina in a polishing liquid through kaolin purification and a method thereof. technical background [0002] China's kaolin mineral resources rank among the top in the world, with 267 proven mines and proven reserves of 2.910 billion tons. Among them: my country's non-coal-built kaolin resources rank fifth in the world. The proven reserves are 1.468 billion tons, mainly distributed The six provinces of Guangdong, Shaanxi, Fujian, Jiangxi, Hunan and Jiangsu account for 84.55% of the country's total reserves; the reserves of coal-bearing construction kaolin (kaolinite) occupy the first place in the world, and the proven reserves are 1.442 billion tons, mainly distributed in Datong, Shanxi. Huairen, Shuozhou, Inner Mongolia Zhungeer, Wuda, Anhui Huaibei, Shaanxi Hancheng and other places, amo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01F7/02C01F7/46C09K3/14
Inventor 左海珍
Owner 湖南恒源精密陶瓷有限公司
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