Strain detection sensor based on graphene film and method of fabricating the same

A graphene thin film, detection sensor technology, applied in the direction of graphene, chemical instruments and methods, electric/magnetic solid deformation measurement, etc., can solve the problems of uncertain number of atomic layers, low concentration of graphene, poor repeatability of experiments, etc., to achieve The effect of controllable process, less wrinkles and easy preparation

Active Publication Date: 2019-07-23
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the preparation of graphene films by liquid phase exfoliation has problems such as low graphene concentration, uncertain number of atomic layers, uncontrollable graphene stack structure, and poor experimental repeatability.
Moreover, the process of preparing graphene by liquid phase exfoliation is complicated and the experimental cycle is long.

Method used

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  • Strain detection sensor based on graphene film and method of fabricating the same
  • Strain detection sensor based on graphene film and method of fabricating the same
  • Strain detection sensor based on graphene film and method of fabricating the same

Examples

Experimental program
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Effect test

Embodiment 1

[0044]A strain detection sensor based on a graphene film, such as figure 1 As shown, wherein, the graphene film comprises two layers of graphene monolayer films 2, and the two layers of graphene monolayer films are stacked together. The graphene on the graphene monolayer film 2 is distributed in an island shape. Graphene monolayer film refers to the graphene film containing only one layer of graphene lattice, and the thickness of graphene monolayer film is equivalent to the height of a carbon atom. Graphene is distributed in islands, that is, there is only one discontinuous graphene film on one plane. The graphene single-layer film is non-conductive; after the two-layer graphene single-layer film is stacked, the two graphene single-layer films partially overlap to form a graphene double-layer stack structure, that is, a graphene double-layer film. Due to the tunneling effect of the graphene bilayer film, electrons can jump between the graphene bilayer films, thereby making t...

Embodiment 2~ Embodiment 5

[0061] Embodiments 2 to 5 are the same as Embodiment 1 except that the flow of methane used in step 102 is different. Table 1 lists the methane flow rates used in step 102 in Embodiment 1 to Embodiment 5.

[0062] Table 1 methane flow rate adopted in step 102 in embodiment 1 to embodiment 5

[0063] Example 1 Example 2 Example 3 Example 4 Example 5 Methane flow / sccm 0.95 1.00 1.05 1.10 1.15

[0064] Figure 3~Figure 7 Respectively be the optical micrograph of the graphene monolayer film that embodiment 1~embodiment 5 prepares. right Figure 3~Figure 7 For comparison: when the methane flow rate is less than 1.0 sccm, the graphene is distributed in an island shape, but the island graphene is relatively sparse; when the methane flow rate is less than 1.0~1.1 sccm, the graphene is distributed in an island shape, and the distribution is uniform and the density is moderate; When the methane flow rate is greater than 1.1 sccm, the island structur...

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Abstract

The invention provides a strain detection sensor based on a graphene film with large strain coefficient and high detection sensitivity and a method of fabricating the same. The strain detection sensorcomprises a graphene film, wherein the graphene film comprises two layers of graphene monolayer films, which are overlapped with each other; and the graphene on the graphene monolayer films is distributed in an island shape. The method of fabricating the strain detection sensor based on the graphene film comprises the following steps of growing graphene monolayer films on a copper substrate; applying a binder to the surface of the graphene monolayer films to obtain a copper substrate-graphene monolayer films-adhesive film; etching the copper substrate in the copper substrate-graphene monolayer films-adhesive film to obtain a graphene monolayer films-adhesive film; lifting up the graphene monolayer films-adhesive film with the other copper substrate-graphene monolayer film to obtain a copper substrate-dual-layer graphene films-adhesive film; and finally completely etching the copper substrate in the copper substrate-dual-layer graphene films-adhesive film to obtain a dual-layer graphene films-adhesive film.

Description

technical field [0001] The invention relates to the field of micro-strain detection, in particular to a graphene film-based strain detection sensor and a preparation method thereof. Background technique [0002] The following background art is provided to help the reader understand the present invention and is not to be admitted as prior art. [0003] Graphene-based strain detection devices are gradually receiving attention, which can play an important role in health monitoring, human-computer interaction, electronic skin and other fields. However, the sensitivity of graphene-based strain detection devices is usually relatively low, which is caused by the rigid and stable structure of graphene. The GF value (gauge factor, gauge factor) of graphene suspension is about 1.9. Therefore, graphene-based strain sensing devices need to improve their sensitivity. [0004] The existing technology utilizes different graphene structures, adjusts the contact channel of graphene, and c...

Claims

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Application Information

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IPC IPC(8): G01B7/16C01B32/186C01B32/194
CPCC01B32/186C01B32/194G01B7/18
Inventor 赵沛梅乐郑浩然任钱诚包高峰邹振兴刘嘉斌王宏涛
Owner ZHEJIANG UNIV
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