Planar room-temperature NH3 sensor based on TPA-DCPP (7,10-bis(diphenyl amino) phenyl-2,3-dicyanopyrazino phenanthrene) organic sensitive film, and preparation method thereof
A technology of ammonia sensor and sensitive thin film, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of poor response recovery characteristics, low sensitivity, easy attenuation, etc., to improve the detection limit and sensitivity, and the device preparation method is simple, The effect of reducing the output resistance
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Embodiment 1
[0032] The TPA-DCPP organic sensitive material was coated on the gold interdigital electrode substrate by spin coating to prepare the room temperature ammonia sensor, and the gas sensitivity of the sensor was tested under 98% relative humidity. The specific process is as follows:
[0033] 1. Preparation of TPA-DCPP organic sensitive material: TPA-DCPP sensitive material is prepared by Suzuki coupling reaction. The synthesis process is as described above. For details, please refer to Angewandte Chemie International Edition (DOI: 10.1002 / anie.201506687) and ZL 201510267689.9.
[0034] 2. Making golden interdigital electrodes and square resistors: in Al with a length and width of 8.2×8.2mm 2 O 3 Photolithographic transfer of the designed electrode mask pattern on the ceramic substrate (8mm×8mm size, the middle area is the interdigital shape, the logarithm is 10 pairs, there is a square resistor at the upper and lower four corners, and the side length is 2×2mm , The width of each interd...
Embodiment 2
[0037] Table 1: Response value data of room temperature ammonia gas sensor prepared by the present invention to 100ppm ammonia gas under different humidity
[0038]
[0039] Table 2: The response value of the device under 98%RH varies with the ammonia concentration
[0040] Ammonia concentration (ppm) Response value (S) 0.55.38% 114.00% 215.53% 522.67% 1027.18% 2048.75% 5054.00% 10076.34%
[0041] Connect the SM-8213 resistance signal tester to the square resistance, and the sensors are placed in air, 500ppb ammonia, 1ppm ammonia, 2ppm ammonia, 5ppm ammonia, 10ppm ammonia, 20ppm ammonia, 50ppm ammonia, 100ppm ammonia Conduct resistance signal test in a good atmosphere. The response value of the device is ΔR / R air , ΔR=R air -R Ammonia .
[0042] Table 1 lists the room temperature ammonia sensors with TPA-DCPP as the organic sensitive film and the gold interdigital electrode as the substrate respectively at 98%RH, 85%RH, 75%RH, 59%RH, 35%RH, 25% RH, 17% RH response value to ...
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