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Slot antenna coupled superconducting transition edge polarization detector array and preparation technology thereof

A detector array and slot antenna technology, applied in the field of superconducting detectors, can solve the problems of bracket damage, unobservation, pollution, etc., and achieve the effects of avoiding bracket damage, rational wiring, and improving sensitivity

Active Publication Date: 2019-08-02
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, currently none of the telescopes used to measure the cosmic microwave background has observed B-mode polarization caused by primordial gravitational waves. Therefore, the performance of the focal plane detector of the telescope, that is, the sensitivity of the superconducting TES array, needs to be further improved, and the preparation process needs to be further optimized.
The BICEP series of telescopes have successfully developed a slot antenna coupled superconducting TES detector array, but the deep silicon etching of the preparation process is to use XeF from the front side of the silicon wafer. 2 gas etch, while XeF 2 It is a poisonous gas, and the pollution is more serious, and etching from the back will affect Si 3 N 4 stent causing damage

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  • Slot antenna coupled superconducting transition edge polarization detector array and preparation technology thereof
  • Slot antenna coupled superconducting transition edge polarization detector array and preparation technology thereof
  • Slot antenna coupled superconducting transition edge polarization detector array and preparation technology thereof

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Embodiment 1

[0043] Such as figure 1 As shown, a slot antenna coupled superconducting transition edge polarization detector array has 64 (8×8 array) pixel units 1, and 512 wire bonding points 2 are distributed at the upper and lower ends of the entire array. Each pixel unit 1 includes a slot antenna array 3, and the slot antenna array 3 is connected to a band-pass filter-4 and a superconducting transition edge sensor-6 acting on microwave signals in the vertical direction and a band-pass filter acting on microwave signals in the horizontal direction 25 and superconducting transition edge sensors 27.

[0044] Such as figure 2 and image 3 As shown, each slot antenna array 3 is made up of 144 (12×12 arrays) slot antenna array units and a microstrip feed network 12, and each of the slot antenna array units is composed of four slot antennas 11 and each The slot antenna 11 is composed of symmetrical feed lines at both ends, wherein, among the four slot antennas 11, two are horizontal slots ...

Embodiment 2

[0064] Its structure is consistent with embodiment 1, and the superconducting metal film A13 material is Mo; The superconducting metal film B is Ti, and the preparation technology of this slot antenna coupling type superconducting conversion edge polarization detector array comprises the following steps:

[0065] Step 1. Use a 4-inch high-resistance double-sided polished silicon wafer, and use thermal oxidation to grow 800nm ​​thick SiO on both sides of the silicon wafer. 2 thin film, then SiO on the front side 2 A low-stress silicon nitride film with a thickness of 3.0 μm was grown on the film using low-pressure chemical vapor deposition technology.

[0066] Step 2. On the front side of the sample obtained in step 1, a 200nm thick Mo film is prepared by magnetron sputtering, and then the first photolithography is performed, and the Mo pattern of the superconducting film is obtained by etching.

[0067] Step 3. On the front side of the sample obtained in step 2, grow SiO wit...

Embodiment 3

[0079] Its structure is consistent with embodiment 1, and superconducting metal film A13 material is AlMn alloy; Superconducting metal film B is Ti, and the preparation technology of this slot antenna coupled type superconducting conversion edge polarization detector array comprises the following steps:

[0080] Step 1. Use a 4-inch high-resistance double-sided polished silicon wafer, and use thermal oxidation to grow 300nm thick SiO on both sides of the silicon wafer. 2 thin film, then SiO on the front side 2 A low-stress silicon nitride film with a thickness of 1.5 μm is grown on the film using low-pressure chemical vapor deposition technology.

[0081] Step 2. On the front side of the sample obtained in step 1, a 150nm thick AlMn film is prepared by magnetron sputtering, and then photolithography is performed for the first time, and a superconducting thin film AlMn pattern is obtained by etching.

[0082] Step 3. On the front side of the sample obtained in step 2, grow Si...

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Abstract

The invention discloses a slot antenna coupled superconducting transition edge polarization detector array. The detector array has 64 pixels, wherein 512 soldering joints are distributed at upper andlower ends of the array, each pixel consists of a slot antenna array, two bandpass filters and two superconducting transition edge sensors, and each superconducting transition edge sensor consists oftwo types of superconducting films with different superconducting transition temperatures connected in series. The invention further provides the preparation process of the slot antenna coupled superconducting transition edge polarization detector array, the photolithographic technique is utilized for preparation, a total of twelve lithography processes are utilized, a SiO2 / Si3N4 support is utilized, harmful gas pollution in the deep silicon etching process and damage to the Si3N4 support are effectively avoided, process stability is higher, and performance is superior.

Description

technical field [0001] The invention belongs to the field of superconducting detectors, in particular to a slot antenna coupled superconducting transformation edge polarization detector array and a preparation process thereof. Background technique [0002] In recent years, the superconducting transition edge sensor (TES) has the advantages of low noise level, high sensitivity, good response linearity, high detection efficiency, high energy resolution, easy array formation, reusable readout, and wide application range. Widespread concern. At present, the focal planes of telescopes used for cosmic microwave background polarization measurement all use superconducting TES detector arrays coupled with microwave antennas. In cosmic microwave background polarimetry experiments, the choice of microwave antenna affects the angle, polarization properties, bandwidth and efficiency of superconducting TES detectors. At present, a variety of microwave antenna coupling techniques have be...

Claims

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Application Information

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IPC IPC(8): H01L39/12H01L39/24H01L27/18H01Q21/00H01Q23/00H01P1/20
CPCH01Q21/00H01Q21/0075H01Q23/00H01P1/20H10N69/00H10N60/85H10N60/01
Inventor 徐达刘建设陈炜
Owner TSINGHUA UNIV
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