Tensile pressure and tensile deformation sensor

Abstract

A tnsile pressure and tensile deformation sensor is provided with two layers of tensile conductive electrodes and a tensile organic-inorganic composite dielectric layer located between the two layersof tensile conductive electrodes. The sensor can be a three-dimensional sensor that can undergo tensile deformation as well as extrusion deformation. The sensor can directly obtain induction of external pressure or tensile stress changes, can obtain sensitive signals without a rear-end signal amplifying circuit, and the sensor can effectively improve sensitivity. The sensor can undergo thickness reduction deformation as well as a thickness increase deformation mode. Furthermore, the sensor has excellent sensitivity, can realize adjustment on the sensitivity through different the organic-inorganic composite dielectric layer, can be applied to various environments and has universality.

Description

technical field [0001] The invention relates to the engineering field of dielectric materials and sensor devices, in particular to a stretchable pressure and stretching deformation sensor. Background technique [0002] In the foreseeable future, the connection between electronic equipment and human beings will become increasingly close, and electronic equipment will realize more advanced and convenient functions such as health detection, information acquisition and as a bridge between human and machine through more contact with human beings. . Wearable devices represented by electronic skin, as a type of electronic device that can directly contact with the human body and can be directly attached to the skin, have become an emerging research hotspot in the field of electronics. [0003] The main principles of traditional pressure sensors can be divided into the following five types: piezoresistive pressure sensors, ceramic pressure sensors, diffused silicon pressure sensors,...

AI Technical Summary

Problems solved by technology

Among them, the conductance of carbon nanotubes is low and the thickness is relatively thin, the stretchability of metal nanoparticles is poor, and the conductivity of metal nanowires is high, but they are easy to break when stretched or compressed; Smaller, the conductivity of carbon black is lower

In addition, these traditional stretchable electrode materials usually have a planar or mesh structure, and when stretched from the side or squeezed from the upper and lower bottom surfaces, the thickness of the sensor is reduced, which has a large impact on the conductivity; but squeezed from the side or The stretching of the bottom surface is prone to breakage, resulting in signal distortion

[0007] At the same time, the dielectric constant of the dielectric layer in the prior art is small. In order to avoid a large drop in capacitance, the thickness of the dielectric layer cannot be made too thick.

However, the stretchable electrode materials in the prior art are planar or network structures, so the thickness of these structures is also relatively thin, generally only tens of nanometers.

Therefore, the sensors in the prior art are limited to a planar structure and cannot be constructed into a three-dimensional device. Therefore, these sensors can only undergo a single type of deformation with a reduced thickness, but not a type of deformation with an increased thickness.

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