A preparation method and product of a large-area nano-flexible electrode based on laser welding
A flexible electrode, laser welding technology, applied in laser welding equipment, welding equipment, conductive layers on insulating carriers, etc., can solve the problems of inability to prepare ultra-thin nano-thickness devices, inability to integrate devices together, and affecting human comfort. , to achieve the effect of avoiding precision reduction, rapid heating process and good integrity
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[0037] A preparation method and product of a large-area nano-flexible electrode based on laser welding, specifically including the following steps:
[0038] Step 1: Prepare a sacrificial layer solution that is very soluble in water. The sacrificial layer solution solute has high temperature resistance, is easily soluble in water, and is easy to evaporate, etc., and the prepared sacrificial solution must be less than the saturation value. Wherein the solute includes but not limited to sodium lauryl sulfate, dodecyltrimethylammonium chloride, sodium dodecylbenzenesulfonate, the solvent includes but not limited to water and alcohol, the mass ratio of solute and solvent The solute concentration affects the thickness of the sacrificial layer and the coating effect. Within the above range, the sacrificial layer solution can form a 1-2um thick sacrificial layer on the substrate surface, which can not only retain the surface morphology, but also achieve rapid The peeling effect, the ...
Embodiment 1
[0061] Mix 3.5g sodium lauryl sulfate and water at a mass ratio of 3.5:100, and stir at 25°C for 15 minutes to form a sacrificial layer solution; clean the substrate with deionized water, isopropanol, ethanol, and deionized water Ultrasonic cleaning with 100W power for 5 minutes, and then rinse with deionized water; soak the substrate with 1% hydrofluoric acid for 3 hours, and it will appear wrinkled; immerse the substrate in the sacrificial layer solution by coating method, and use the stretching rudder The machine is lifted vertically upward at a speed of 0.1mm / s. During the lifting process, the water is continuously evaporated to crystallize sodium dodecyl sulfate to form a sacrificial layer with a thickness of 1μm;
[0062] PI tape with a thickness of 20um is patterned by laser cutting; the patterned PI tape is attached to a substrate coated with a sacrificial layer; 0.8g of gold is evaporated and deposited on the substrate to form an 80nm thick gold film covering On the m...
Embodiment 2
[0065] Mix 16g of dodecyltrimethylammonium chloride with water at a mass ratio of 16:100, and stir at 50°C for 20 minutes to form a sacrificial layer solution; clean the substrate with deionized water, isopropanol, and ethanol 1. Ultrasonic cleaning with deionized water for 5 minutes according to the power of 100W, and then rinse with deionized water; soak the substrate with 5% hydrofluoric acid for 3 hours, and it will form wrinkles; the substrate is immersed in the sacrificial layer solution by coating method, Use the stretching steering gear to lift vertically upward at a speed of 0.4mm / s. During the lifting process, the water evaporates continuously so that sodium lauryl sulfate crystallizes and precipitates to form a sacrificial layer with a thickness of 2 μm;
[0066] A 50um thick PI tape is patterned by laser cutting; the patterned PI tape is attached to a substrate coated with a sacrificial layer; 1g of gold is evaporated on the substrate to form a 100nm thick gold film...
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