Gallium nitride crystal growth apparatus and gallium nitride crystal growth method
A crystal growth and gallium nitride technology, applied in crystal growth, single crystal growth, single crystal growth, etc., can solve problems such as uneven crystal thickness, raw material loss, and low crystal quality, so as to reduce raw material loss and improve growth Effects of speed and crystallization quality
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[0040] (First embodiment)
[0041] According to Figure 2 to Figure 3 The first embodiment of the gallium nitride crystal growth apparatus according to the present invention will be described in detail.
[0042] In this embodiment, as figure 2 As shown, the gallium nitride crystal growth device according to the present invention includes a reaction vessel 1, a raw material region 2, a crystallization region 3, a partition plate 4, and a heating device assembly 5.
[0043] In this embodiment, the entire reaction vessel 1 has a substantially cylindrical shape, and the reaction vessel 1 is filled with liquid ammonia.
[0044] The raw material area 2 includes a first raw material area 21 and a second raw material area 22, and each raw material area 2 is provided with a raw material basket 23 for installing polycrystalline culture materials.
[0045] The crystallization region 3 includes a first crystallization region 31, a second crystallization region 32 and a third crystallization regio...
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[0061] (Second embodiment)
[0062] According to Figure 4 The second embodiment of the gallium nitride crystal growth apparatus according to the present invention will be described in detail.
[0063] In this embodiment, as Figure 4 As shown, the gallium nitride crystal growth device according to the present invention includes a reaction vessel 10, a raw material region 20, a crystallization region 30, a partition plate 40, and a heating device assembly 50.
[0064] The structures of the reaction container 10, the partition 40, and the heating device assembly 50 in this embodiment are substantially the same as the structures of the reaction container 1, the partition 4, and the heating device assembly 5 in the first embodiment, respectively.
[0065] In this embodiment, as Figure 4 As shown, the raw material area 20 includes a third raw material area 201, a fourth raw material area 202, and a fifth raw material area 203. Each raw material zone 20 is provided with a raw material bas...
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