Method for preparing longitudinal heterojunctions of single-layer transition metal chalcogenides by no-glue transfer

A transition metal chalcogenide, compound technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve the problem of inability to adjust the relative angle of vertical heterojunction, transition metal chalcogenide doping, experimental parameters Sensitivity and other issues, to promote research and application, prevent damage and doping, and solve the effect of residual glue

Active Publication Date: 2019-09-17
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Generally, chemical vapor deposition can also be used to prepare vertical heterojunctions of transition metal chalcogenides. However, when this method is used to prepare vertical heterojunctions, the preparation results are very sensitive to experimental parameters, which are difficult to control and require a lot of effort. Find the best experimental conditions, and the vertical heterojunction prepared by chemical vapor deposition always has a fixed relative orientation, and the relative angle between the two materials of the vertical heterojunction cannot be adjusted
In addition to the chemical vapor deposition method, we can also use the transfer method to prepare transition metal chalcogenide vertical heterojunctions. It is not only simple and efficient, but also can adjust the relative angle of the vertical heterojunction materials. At present, many met

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  • Method for preparing longitudinal heterojunctions of single-layer transition metal chalcogenides by no-glue transfer
  • Method for preparing longitudinal heterojunctions of single-layer transition metal chalcogenides by no-glue transfer
  • Method for preparing longitudinal heterojunctions of single-layer transition metal chalcogenides by no-glue transfer

Examples

Experimental program
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Example Embodiment

[0046] Example 1, Preparation of MoS by chemical vapor deposition method 2 Take for example.

[0047] Place 100 mg of sulfur powder in the first quartz boat 15, and place 0.5 mg of the transition metal oxide powder and molten salt powder mixture in the second quartz boat 13. The transition metal oxide selected in this embodiment is MoO 3 , The usage amount is about 0.3mg, the selected molten salt is NaCl, the usage amount is about 0.2mg. 14 is the growth film substrate, that is, the substrate used for the growth and preparation of transition metal chalcogenides by chemical vapor deposition, and SiO is used in this embodiment 2 / Si as the substrate. The two quartz boats are placed in the quartz tube 11 lined with the tube furnace insulation material 12, placed in the tube furnace, and heated to 650℃ by the tube furnace at a high temperature, so that the powder in the quartz boat is heated and evaporated into a gas phase. Under the transportation of the carrier gas Ar, the vaporize...

Example Embodiment

[0049] Example 2, Preparation of MoSe by chemical vapor deposition 2 Take for example.

[0050] Place 50 mg of selenium powder in the first quartz boat 15, and place 1.5 mg of a mixture of transition metal oxide powder and molten salt powder in the second quartz boat 13. The transition metal oxide selected in this embodiment is MoO 3 , The usage amount is about 1.0mg, the selected molten salt is NaCl, and the usage amount is about 0.5mg. 14 is a thin-film growth substrate, that is, a substrate used for the growth and preparation of transition metal chalcogenides by chemical vapor deposition. In this embodiment, glass is used as the substrate. The two quartz boats are placed in the quartz tube 11 lined with the tube furnace insulation material 12, placed in the tube furnace, and heated to 900°C through the tube furnace, so that the powder in the quartz boat is heated and evaporated into the gas phase. Carrier gas Ar / H 2 Under the transportation, the vaporized gas phase is mixed an...

Example Embodiment

[0052] Example 3 Preparation of WS by chemical vapor deposition method 2 Take for example.

[0053] Place 300 mg of sulfur powder in the first quartz boat 15, and place 15 mg of a mixture of transition metal oxide powder and molten salt powder in the second quartz boat 13. The transition metal oxide selected in this embodiment is WO 3 , The usage amount is about 10mg, the selected molten salt is NaI, the usage amount is about 5mg. 14 is the growth film substrate, that is, the substrate used for the growth and preparation of transition metal chalcogenides by chemical vapor deposition, and SiO is used in this embodiment 2 / Si as the substrate. The two quartz boats are placed in the quartz tube 11 lined with the tube furnace insulation material 12, placed in the tube furnace, and heated to 850°C through the tube furnace, so that the powder in the quartz boat is heated and evaporated into the gas phase. Carrier gas Ar / H 2 Under the transportation, the vaporized gas phase is mixed and...

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Abstract

The invention discloses a method for preparing longitudinal heterojunctions of single-layer transition metal chalcogenides by no-glue transfer. Firstly, fused salt is mixed with transition metal oxide powder as an evaporation source; and transition metal chalcogenides are prepared through growth of the fused salt assisted by a chemical vapor deposition method. Then, de-ionized water is used, and is contacted with the transition metal chalcogenides; the transition metal chalcogenides can float along with water; through flowing of the water, the transition metal chalcogenides are transferred to any target substrate; and the longitudinal heterojunctions and multiple layers of stacked longitudinal heterojunctions are prepared through multiple times of transfer of the transition metal chalcogenides. Any organic glue is not used as a middle auxiliary layer, so that the problem of glue remaining can be solved; and any corrosive solution cannot be used, so that the destruction and the doping of the corrosive solution to the transition metal chalcogenides can be prevented, a new method is provided for transfer of the transition metal chalcogenides and preparation of the longitudinal heterojunctions thereof, and the important significance on acceleration of the research and the application of the transition metal chalcogenides and the longitudinal heterojunctions thereof is achieved.

Description

technical field [0001] The invention relates to indicators of direct bandgap semiconductor materials, in particular to a method for preparing a vertical heterojunction of a single-layer transition metal chalcogenide by non-adhesive transfer. Background technique [0002] As a single-layer transition metal chalcogenide is a direct bandgap semiconductor material, it has important application prospects in energy devices, chemical catalysis, and optoelectronic devices. Combining two or more single-layer transition metal chalcogenides to form a vertically structured heterojunction, the change in the interaction between vertical heterojunctions will provide a new degree of freedom for the exploration of new physical properties of transition metal chalcogenides , to provide new ideas for the design of new electronic devices. Chemical vapor deposition (Chemical vapor deposition, CVD) is the most common method for preparing single-layer transition metal chalcogenides. It is easy to ...

Claims

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Application Information

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IPC IPC(8): C23C16/30C23C16/56
CPCC23C16/305C23C16/56
Inventor 潘毅张林闵泰
Owner XI AN JIAOTONG UNIV
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