Method for preparing longitudinal heterojunctions of single-layer transition metal chalcogenides by no-glue transfer
A transition metal chalcogenide, compound technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve the problem of inability to adjust the relative angle of vertical heterojunction, transition metal chalcogenide doping, experimental parameters Sensitivity and other issues, to promote research and application, prevent damage and doping, and solve the effect of residual glue
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[0046] Example 1, Preparation of MoS by chemical vapor deposition method 2 Take for example.
[0047] Place 100 mg of sulfur powder in the first quartz boat 15, and place 0.5 mg of the transition metal oxide powder and molten salt powder mixture in the second quartz boat 13. The transition metal oxide selected in this embodiment is MoO 3 , The usage amount is about 0.3mg, the selected molten salt is NaCl, the usage amount is about 0.2mg. 14 is the growth film substrate, that is, the substrate used for the growth and preparation of transition metal chalcogenides by chemical vapor deposition, and SiO is used in this embodiment 2 / Si as the substrate. The two quartz boats are placed in the quartz tube 11 lined with the tube furnace insulation material 12, placed in the tube furnace, and heated to 650℃ by the tube furnace at a high temperature, so that the powder in the quartz boat is heated and evaporated into a gas phase. Under the transportation of the carrier gas Ar, the vaporize...
Example Embodiment
[0049] Example 2, Preparation of MoSe by chemical vapor deposition 2 Take for example.
[0050] Place 50 mg of selenium powder in the first quartz boat 15, and place 1.5 mg of a mixture of transition metal oxide powder and molten salt powder in the second quartz boat 13. The transition metal oxide selected in this embodiment is MoO 3 , The usage amount is about 1.0mg, the selected molten salt is NaCl, and the usage amount is about 0.5mg. 14 is a thin-film growth substrate, that is, a substrate used for the growth and preparation of transition metal chalcogenides by chemical vapor deposition. In this embodiment, glass is used as the substrate. The two quartz boats are placed in the quartz tube 11 lined with the tube furnace insulation material 12, placed in the tube furnace, and heated to 900°C through the tube furnace, so that the powder in the quartz boat is heated and evaporated into the gas phase. Carrier gas Ar / H 2 Under the transportation, the vaporized gas phase is mixed an...
Example Embodiment
[0052] Example 3 Preparation of WS by chemical vapor deposition method 2 Take for example.
[0053] Place 300 mg of sulfur powder in the first quartz boat 15, and place 15 mg of a mixture of transition metal oxide powder and molten salt powder in the second quartz boat 13. The transition metal oxide selected in this embodiment is WO 3 , The usage amount is about 10mg, the selected molten salt is NaI, the usage amount is about 5mg. 14 is the growth film substrate, that is, the substrate used for the growth and preparation of transition metal chalcogenides by chemical vapor deposition, and SiO is used in this embodiment 2 / Si as the substrate. The two quartz boats are placed in the quartz tube 11 lined with the tube furnace insulation material 12, placed in the tube furnace, and heated to 850°C through the tube furnace, so that the powder in the quartz boat is heated and evaporated into the gas phase. Carrier gas Ar / H 2 Under the transportation, the vaporized gas phase is mixed and...
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