A kind of interdigitated large-area flexible array sensor and its preparation method

Abstract

The invention relates to the field of sensors, and discloses an interdigitated large-area flexible array sensor and a preparation method thereof. The sensor includes an electrode plate provided with an interdigitated array electrode and a wire, a flexible substrate, and an electrode plate and a flexible substrate between the electrode plate and the flexible substrate. The array pressure-sensitive layer and the insulating adhesive layer, the interdigital array electrodes include a number of array units containing the same interdigital electrodes, the wires include row wires and column wires, and the two ends of each interdigital electrode are respectively connected to the row wires and column wires, The preparation method comprises the following steps: preparing an electrode plate by a screen printing process; preparing a pressure-sensitive composite material; printing an uncured pressure-sensitive composite material on an array unit on the electrode plate by a screen printing process to form an array pressure-sensitive layer ; Bonding the electrode plate and the flexible substrate through insulating glue. The invention has simple process, high efficiency and low cost, and the prepared large-area high-density flexible array sensor has high sensitivity, good stability and large pressure sensing range.

Description

technical field [0001] The invention relates to the field of sensors, in particular to an interdigitated large-area flexible array sensor and a preparation method thereof. Background technique [0002] With the improvement of science and technology and modernization level, people have higher and higher requirements for pressure monitoring. It is no longer limited to pressure monitoring on regular rigid surfaces, and there are various forms. Ordinary rigid sensors can no longer meet people's actual needs. . Flexible pressure sensors can be bent or even folded at will, small in size, thin in thickness, flexible materials are basically non-toxic and harmless, and have good compatibility with the human body. A lot of research and application have been done. [0003] In recent years, with the rapid development of robotic bionic skin, flexible wearable devices and other fields, people's demand for large-area and high-density flexible sensor arrays has continued to increase. Sen...

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Problems solved by technology

[0007] The first purpose of the present invention is to overcome the low material utilization rate and high production cost in the prior art when the traditional photolithography process is used to prepare large-area flexible array sensors. When large-area integration, if the array density is high, the It will lead to the problems that the efficiency is too low and the preparation is too difficult. An interdigitated large-area flexible array sensor and its preparation method are provided, which are prepared by a full screen printing process. The process is simple, the efficiency is high, and the cost is low. And the prepared The large-area flexible array sensor has high sensitivity, good stability and large pressure sensing range

[0008] The second object of the present invention is to overcome the problem that the upper and lower plates of the sensors with the “sandwich” structure in the prior art must be precisely aligned during packaging, which requires high technology and reduces the packaging efficiency of the sensor. If there is no alignment, it will For the problem affecting the performance of the sensor, an interdigitated large-area flexible array sensor and its preparation method are provided. The interdigitated electrodes are used in the sensor, and the electrodes can be made on the same substrate material, which avoids the problem of precise alignment of the upper and lower electrode arrays. Process flow, improving assembly efficiency

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