A Self-Driven Miniature Ammonia Gas Sensing System
A sensing system and ammonia gas sensor technology, applied in the field of MEMS, can solve the problems of difficulty in miniaturizing gas detection systems and reducing the significance of sensor miniaturization.
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[0027] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0028] refer to figure 1 , a self-driven miniature ammonia sensing system including MoS 2 Nanogenerator, miniature ammonia sensor;
[0029] The MoS 2 The nanogenerator structure from top to bottom is: polydimethylsiloxane PDMS protective layer 1-1, MoS 2 Layers 1-2, nanogenerator flexible substrates 1-3; MoS 2 The two ends of the layer 1-2 are respectively connected with the metal electrodes 1-4 of the nanogenerator;
[0030] The MoS 2 Layer 1-2 is a monoatomic layer single crystal structure with a thickness of only 0.6 nanometers.
[0031] The material of the flexible substrate 1-3 of the nano-generator is any one of polyethylene terephthalate PET and polyimide PI, and the thickness is 100-500 microns.
[0032] MoS 2 Nano generator processing and testing:
[0033] Preparation of MoS by Chemical Vapor Deposition 2 . ...
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