A Self-Driven Miniature Ammonia Gas Sensing System

A sensing system and ammonia gas sensor technology, applied in the field of MEMS, can solve the problems of difficulty in miniaturizing gas detection systems and reducing the significance of sensor miniaturization.

Active Publication Date: 2020-10-30
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The miniature sensor has to be equipped with an ordinary battery power supply much larger than it, which greatly reduces the significance of sensor miniaturization and makes it difficult to realize the overall miniaturization of the gas detection system

Method used

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  • A Self-Driven Miniature Ammonia Gas Sensing System
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  • A Self-Driven Miniature Ammonia Gas Sensing System

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Embodiment Construction

[0027] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0028] refer to figure 1 , a self-driven miniature ammonia sensing system including MoS 2 Nanogenerator, miniature ammonia sensor;

[0029] The MoS 2 The nanogenerator structure from top to bottom is: polydimethylsiloxane PDMS protective layer 1-1, MoS 2 Layers 1-2, nanogenerator flexible substrates 1-3; MoS 2 The two ends of the layer 1-2 are respectively connected with the metal electrodes 1-4 of the nanogenerator;

[0030] The MoS 2 Layer 1-2 is a monoatomic layer single crystal structure with a thickness of only 0.6 nanometers.

[0031] The material of the flexible substrate 1-3 of the nano-generator is any one of polyethylene terephthalate PET and polyimide PI, and the thickness is 100-500 microns.

[0032] MoS 2 Nano generator processing and testing:

[0033] Preparation of MoS by Chemical Vapor Deposition 2 . ...

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Abstract

Provided in the invention is a self-driven miniature ammonia gas sensing system comprising a MoS2 nanogenerator and a miniature ammonia gas sensor. The MoS2 nanogenerator consists of a polydimethylsiloxane protective layer, a MoS2 layer 1-2, and a nano-generator flexible substrate that are arranged successively from top to bottom. The two ends of the MoS2 layer are respectively connected with metal electrodes of the nanogenerator. The miniature ammonia gas sensor includes a gas sensitive material and sensor substrate that are arranged successively from top to bottom; the two ends of the gas sensitive material are connected with metal electrodes of the sensor respectively. The nanogenerator metal electrode at one side of the MoS2 nanogenerator and the sensor metal electrode at one side of the miniature ammonia sensor are connected by a load resistor. The miniature ammonia gas sensor has high sensitivity and fast response speed; and the mechanical energy in the environment is converted into electrical energy through the MoS2 nanogenerator and thus power supply based on a battery is avoided, so that the dependence on the power supply of the battery by the sensor is eliminated.

Description

technical field [0001] The invention relates to the technical field of MEMS, in particular to a self-driven miniature ammonia sensor system. Background technique [0002] Ammonia is one of the major air pollutants. Exposure to low concentrations of ammonia can cause symptoms such as rhinitis, pharyngitis, sore throat, and expectoration; exposure to higher concentrations of ammonia can burn the skin, eyes, and mucous membranes of respiratory organs, leading to hemoptysis, pulmonary edema, and even cancer. Ammonia is an important "marker" for disease diagnosis. The abnormal concentration of ammonia gas in the breath can be used to realize early warning of diseases such as renal failure. Therefore, detecting the concentration of ammonia in the breath can be used as a simple, effective and painless method for early diagnosis of diseases, which can save the precious lives of more patients. Both environmental detection and health monitoring have put forward an urgent need for r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/30G01N27/12H02N2/18B81B7/02
CPCB81B7/02G01N27/12G01N27/127G01N27/128G01N27/30H02N2/18
Inventor 李鹏张冬至杨志民张泽坤
Owner TSINGHUA UNIV
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