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Macro-micro dual-driving precision positioning device based on active vibration isolation, and control method

A precision positioning and positioning device technology, applied in the direction of digital control, vibration suppression adjustment, electrical program control, etc., can solve the problems of reducing the positioning accuracy and motion performance of the device, low stiffness of flexible hinges, large inertia, etc., to achieve suppression of harmful vibrations, The effect of smooth operation and large driving force

Active Publication Date: 2019-11-12
SOUTH CHINA UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Flexible mechanisms are often used in robot precision positioning systems due to their simple structure, high work efficiency, and no friction. The low hinge stiffness makes it easy for the micro-motion platform to be affected by elastic vibration, reducing the positioning accuracy and motion performance of the entire device

Method used

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  • Macro-micro dual-driving precision positioning device based on active vibration isolation, and control method
  • Macro-micro dual-driving precision positioning device based on active vibration isolation, and control method
  • Macro-micro dual-driving precision positioning device based on active vibration isolation, and control method

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Embodiment

[0037] Such as Figure 1-Figure 4 As shown, a macro-micro dual-drive precision positioning device based on active vibration isolation, the device includes a mechanical movement body unit, a detection unit and a drive control unit;

[0038] The mechanical movement body unit includes a positioning device base 13, a U-shaped platform, a micro-motion platform 1, an iron linear motor 12 and an APA driver;

[0039] Two linear guide rails 11 of the same specification are fixed on the boss of the positioning device base 13. There are two sliders on each guide rail, and the two guide rails are installed in parallel. The distance between the two guide rails is 120mm; The side panel 7 of the U-shaped platform is spliced ​​with a U-shaped platform bottom panel 17, and the two U-shaped platform side panels are parallel to each other and vertically fixed on the U-shaped platform bottom panel; the U-shaped platform is connected with the slider on the guide rail, and the base can be positione...

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Abstract

The invention discloses a macro-micro dual-driving precision positioning device based on active vibration isolation, and a control method. The macro-micro dual-driving precision positioning device comprises a mechanical motion body unit, a detection unit and a driving control unit; the mechanical motion body unit comprises a positioning device base, a U-shaped table, a micro inching platform, an iron linear motor and an APA driver; the detection unit comprises an optical grating displacement sensor for detecting the displacement of the U-shaped table, a laser interferometer for detecting the displacement of the micro inching platform, and a capacitor displacement sensor for detecting the horizontal-direction vibration quantity, relative to the U-shaped table, of the micro inching platform;and the control unit comprises a linear motor servo amplifier, an APA linear amplifier, a motion control card, a computer and a data acquisition card. According to the macro-micro dual-driving precision positioning device, vibration isolation is conducted in an active mode, the influence of machine vibration on the positioning platform is effectively reduced, and higher-precision positioning canbe further achieved.

Description

technical field [0001] The invention relates to the field of precision positioning, in particular to a macro-micro dual-drive precision positioning device based on active vibration isolation and a control method. Background technique [0002] Modern scientific instruments and equipment are constantly developing towards higher precision. Whether it is equipment used for processing and manufacturing or instruments used for testing, they have higher and higher requirements for precision control. On the other hand, in order to meet efficient production Manufacturing requirements, the operation of the machine and its response speed are also getting higher and higher. However, with the improvement of these performances, other problems that cannot be ignored also appear. Among them, the requirements for micro-vibration control have reached unprecedented heights, and active vibration control technology is often used to control low-frequency micro-vibrations. [0003] Flexible mech...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q1/25B23Q11/00G12B3/00F16F15/00G05B19/19
CPCB23Q1/25B23Q11/0032G12B3/00F16F15/002G05B19/19
Inventor 邱志成姚锡森张宪民
Owner SOUTH CHINA UNIV OF TECH
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