Normally-off field effect transistor and preparation method thereof

Abstract

The invention discloses a normally-off field effect transistor and a preparation method thereof. The transistor comprises: a gallium nitride substrate (1); a gallium oxide epitaxial layer (2) formed on the gallium nitride substrate (1), wherein a gallium nitride / gallium oxide heterojunction interface is formed at the interface of the gallium oxide epitaxial layer and the gallium nitride substrate;an aluminum nitride epitaxial layer (3) formed on the gallium oxide epitaxial layer (2), wherein an aluminum nitride / gallium oxide heterojunction interface is formed at the interface of the aluminumnitride epitaxial layer and the gallium oxide epitaxial layer; and a cap layer (4) formed on the aluminum nitride epitaxial layer (3). According to the transistor, the material characteristics of III-nitride and gallium oxide are fully utilized, and high-density polarized charges are generated at an aluminum nitride / gallium oxide interface; in the aspect of achieving normally-off operation, p-typegallium nitride is adopted as a gate cap layer, so that the threshold voltage is not influenced by an interface state, the reliability of the field effect transistor is enhanced, the resistivity below a channel is improved, and the drain leakage current and the sub-threshold swing are reduced.

Description

technical field [0001] The invention relates to the field of semiconductor devices, in particular to a normally-off field effect transistor and a preparation method thereof. Background technique [0002] Existing semiconductor normally-off field effect transistors are mainly realized by aluminum gallium nitride / gallium nitride (AlGaN / GaN)-based semiconductor materials. Since both AlGaN and GaN have a polarization effect, the AlGaN / GaN interface will generate polarized positive charges to attract electrons, forming a two-dimensional electron gas (2DEG), and transporting electrons through the 2DEG channel at the interface. [0003] The defects of this kind of transistor are as follows: First, the polarized charge of opposite polarity generated at the interface between AlGaN and GaN materials will reduce the net polarized charge density, resulting in a decrease in 2DEG concentration and conductivity, which limits device performance. Second, AlGaN / GaN-based normally-off field e...

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