Method for preparing DLC film on surface of super martensitic stainless steel

A martensitic stainless steel, super technology, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of changing structure performance, matrix phase transformation, low phase transformation temperature, etc., to prevent phase transformation , dense structure, and the effect of improving weldability

Pending Publication Date: 2019-12-10
UNIV OF SCI & TECH LIAONING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the structure of super martensitic stainless steel is tempered martensite, and the phase transformation temperature is low. Excessively high deposition temperature will cause phase transformation of the matrix and change its structure and properties.

Method used

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  • Method for preparing DLC film on surface of super martensitic stainless steel

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] The method for preparing DLC ​​thin film on super martensitic stainless steel surface, comprises the following steps:

[0034] 1) Substrate preparation: 13Cr super martensitic stainless steel is selected as the substrate 7 for coating, and the chemical composition of 13Cr super martensitic stainless steel is calculated by weight percentage:

[0035] C: 0.01%~0.03%, Si: 0.15%~0.5%, Mn: 0.2%~2%, Cr: 12%~13%, Mo: 0.5~3.5%, Ni: 5.0%~8.0%, S≤0.035 %, P≤0.015%, Cu≥0.047%, and the rest are iron and unavoidable impurities.

[0036] The substrate 7 was cut into a sample with a specification of 15×15×8 mm, and was polished to a mirror surface with metallographic sandpaper, and then polished until there were no scratches visible to the naked eye on the surface.

[0037] The prepared samples were immersed in absolute ethanol for ultrasonic cleaning, the heating temperature was 50°C, the ultrasonic frequency was 50 Hz, and the cleaning was performed for 20-30 minutes. Take it out ...

Embodiment 2

[0048] In this example, a DLC film is prepared on the surface of 13Cr super martensitic stainless steel by plasma enhanced chemical vapor deposition technology, and the working gas is acetylene and argon with a purity of 99.99%; high-pressure cleaning is carried out with a pulse bias voltage of 3000V for 1 hour; the chamber pressure is 2Pa. By adjusting the pulse bias voltage and comparing the quality of DLC films prepared under different parameter conditions, the optimal process parameters for film preparation are given.

[0049] The specific operation steps of the present embodiment are the same as in Example 1, and the specific preparation process parameters are respectively:

[0050] The pulse bias voltage is: 1800V;

[0051] The deposition temperature is: 100°C;

[0052] Deposition time: 2h

[0053] The morphology, mechanical properties and corrosion resistance of the prepared films were tested.

[0054] The thickness of the DLC film prepared by this method is 1.2052μ...

Embodiment 3

[0056] In this embodiment, a DLC film is prepared on the surface of 13Cr super martensitic stainless steel by plasma enhanced chemical vapor deposition technology, and the working gas is acetylene and argon with a purity of 99.99%; the chamber pressure is 2Pa. By adjusting the pulse bias voltage and comparing the quality of DLC films prepared under different parameter conditions, the optimal process parameters for film preparation are given.

[0057] The specific operation steps of this embodiment are the same as those of Embodiment 1.

[0058] The specific preparation process parameters are respectively:

[0059] The pulse bias voltage is: 2400V;

[0060] The deposition temperature is: 100°C;

[0061] Deposition time: 2h

[0062] The morphology, mechanical properties and corrosion resistance of the prepared films were tested.

[0063] The thickness of the DLC film prepared by this method is 1.7132μm. The thin film has a dense structure with a roughness of 3.04nm, complet...

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Abstract

The invention relates to a method for preparing a DLC film on a surface of super martensitic stainless steel; 13Cr super martensitic stainless steel is used as a substrate for coating the film; a metal mesh cage is arranged in a vacuum cavity, a hollow glass brick with an explosion-proof port is placed in the vacuum cavity, a metal mesh cage is placed on an insulation glass brick, the front, rear,left and right faces of the metal mesh cage are opened, so that electronic escape forms a loop; the substrate is subjected to ultrasonic cleaning after polishing, and then the substrate is placed inthe metal mesh cage of the vacuum cavity for high pressure cleaning, the film to be coated of the substrate is upwards; a Si/Si-C transition layer is prepared before coating the film, so that the film-based bonding force is improved; and the DLC film is prepared through a plasma-enhanced chemical vapor deposition technology. The method has the following advantage that the high modulus of the substrate solves the problem of excessive stress during the preparation process of the DLC film. The DLC film prepared on the surface of the super martensitic stainless steel has a dense structure, obviously improves the substrate hardness and reduces friction and corrosion resistance.

Description

technical field [0001] The invention belongs to the field of film preparation by chemical vapor deposition, in particular to a method for preparing a DLC film on the surface of super martensitic stainless steel. Background technique [0002] Due to its good strength, toughness, excellent corrosion resistance and low cost, super martensitic stainless steel can be used as a substitute for super duplex stainless steel in many stainless steel application fields. Compared with traditional martensitic stainless steel, reducing the C content below 0.03% greatly improves its welding performance, and also has higher tensile strength, which can be used in large-scale production. Control the Cr content at 12% to 13%, reduce the pitting sensitivity and improve its corrosion resistance, reduce the appearance of delta ferrite, and ensure the toughness and stress corrosion resistance of super martensite. Therefore, super martensitic stainless steel is mainly used in fields such as petrole...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/50C23C16/26C23C16/02C22C38/02C22C38/04C22C38/42C22C38/44C22C38/58
CPCC22C38/002C22C38/02C22C38/04C22C38/42C22C38/44C22C38/58C23C16/0227C23C16/0272C23C16/26C23C16/50
Inventor 周艳文张豫坤赵卓陈东旭王亚男吕哲邓洪运祁继隆杨力刘梦楠康红伟张晶
Owner UNIV OF SCI & TECH LIAONING
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