Electron microscopic imaging system and imaging method

Abstract

The invention discloses an electron microscopic imaging system and an imaging method, and belongs to the field of electron imaging. The electron microscopic imaging system comprises a plurality of charged particle sources, wherein the charged particle sources are used for emitting charged particles; a convergence unit located under the charged particle sources; a diffraction unit located under theconvergence unit, a sample being arranged between the diffraction unit and the convergence unit; and a detector located under the diffraction unit. According to the method, the plurality of charged particle sources emit charged particles to form a plurality of charged particle beams; the plurality of charged particle beams pass through the convergence unit to form a charged particle beam probe; the charged particle beam probe penetrates through the sample and forms a diffraction pattern of the sample through the diffraction unit; and the detector receives the diffraction pattern and performsstacked imaging to reconstruct a sample image. The system aims to overcome the defects that when a single electron beam is used as an electron beam probe, the imaging quality is reduced and the data acquisition efficiency is reduced due to frequent movement; and the data acquisition efficiency and the imaging quality can be improved.

Description

technical field

[0001] The invention relates to the field of electronic imaging, and more specifically, to an electron microscopic imaging system and an imaging method. Background technique

[0002] Scanning electron microscopy imaging is developed on the basis of electron microscopy imaging. The electron beam emitted by the electron gun and accelerated by high-speed voltage is focused on a very small range on the sample to be tested through an electromagnetic lens, and it is controlled to scan on the sample. , and then use a variety of electronic signal receivers to collect the electrons after the interaction with the sample, and obtain fine sample information from it, which has a wide range of applications in physics, chemistry, material science, biology and other disciplines.

[0003] In an electron microscope, the electron gun is one of the most important components, which is equivalent to the light source in an optical microscope. The electron gun largely affects the qu...

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