Unlock instant, AI-driven research and patent intelligence for your innovation.

Preparation method of sapphire magnetorheological chemical mechanical polishing solution

A chemical mechanical and polishing fluid technology, applied to polishing compositions containing abrasives, etc., can solve problems such as high roughness and burrs on the surface, and achieve the effects of reducing surface roughness, easy cleaning, and high removal rate

Inactive Publication Date: 2020-01-24
江苏吉星新材料有限公司
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the existing magnetorheological mechanical polishing process, the material removal rate of the polishing liquid is relatively high, but the surface of the material has burrs and high roughness after polishing

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] A kind of preparation method of sapphire magneto-rheological chemical mechanical polishing liquid, polishing liquid is used under the state of electromagnetic stirring during polishing, and described preparation method comprises the following steps:

[0016] Step 1. At room temperature, after dissolving 2 parts by mass of aluminum isopropoxide in 16 parts by mass of toluene and 0.5 parts by mass of dioxane, add 1 part by mass of deionized water, and then ultrasonically disperse for 10 hours to obtain Al 2 o 3 Sol;

[0017] Step 2. to the Al prepared in step 1 2 o 3 While stirring the sol, add ethylenediamine to adjust the pH to 8, then add 1 mass part of 30wt.% alkaline organosilicon sol, and electromagnetically stir for 10 minutes to obtain a stirred mixed solution;

[0018] Step 3. Add 0.5 parts by mass of surfactant, 1 part by mass of oxidizing agent, 0.5 parts by mass of dispersant and 10 parts by mass of deionized water to the mixed solution after stirring in st...

Embodiment 2

[0020] A kind of preparation method of sapphire magneto-rheological chemical mechanical polishing liquid, polishing liquid is used under the state of electromagnetic stirring during polishing, and described preparation method comprises the following steps:

[0021] Step 1. At room temperature, after dissolving 4 parts by mass of aluminum isopropoxide in 20 parts by mass of toluene and 1.5 parts by mass of dioxane, add 5 parts by mass of deionized water, and then ultrasonically disperse for 15 hours to obtain Al 2 o 3 Sol;

[0022] Step 2. to the Al prepared in step 1 2 o 3 While stirring the sol, add ethylenediamine to adjust the pH to 9, then add 3 parts by mass of 30wt.% alkaline organosilicon sol, and stir electromagnetically for 20 minutes to obtain a mixed solution after stirring;

[0023] Step 3. Add 1.2 parts by mass of surfactant, 3 parts by mass of oxidant, 0.8 parts by mass of dispersant and 20 parts by mass of deionized water to the mixed solution after stirring ...

Embodiment 3

[0025] A kind of preparation method of sapphire magneto-rheological chemical mechanical polishing liquid, polishing liquid is used under the state of electromagnetic stirring during polishing, and described preparation method comprises the following steps:

[0026] Step 1. At room temperature, after dissolving 3 parts by mass of aluminum isopropoxide in 18 parts by mass of toluene and 1 part by mass of dioxane, add 4 parts by mass of deionized water, and then ultrasonically disperse for 12 hours to obtain Al 2 o 3 Sol;

[0027] Step 2. to the Al prepared in step 1 2 o 3 While stirring the sol, add ethylenediamine to adjust the pH to 9, then add 2 parts by mass of 30wt.% alkaline organosilicon sol, and stir electromagnetically for 15 minutes to obtain a mixed solution after stirring;

[0028] Step 3. Add 1 part by mass of surfactant, 2 parts by mass of oxidant, 0.5 part by mass of dispersant and 15 parts by mass of deionized water to the mixed solution after stirring in step...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a preparation method of a sapphire magnetorheological chemical mechanical polishing solution, and belongs to the technical field of sapphire surface treatment. The method comprises the following steps: dissolving aluminum isopropoxide in a mixture of toluene and dioxane at room temperature, adding deionized water, and performing ultrasonic dispersion to obtain Al2O3 sol; adding ethylenediamine into the Al2O3 sol while stirring to adjust the pH value to alkalinity, then adding alkaline organic silica sol, and performing electromagnetic stirring to obtain a stirred mixedsolution; and adding a surfactant, an oxidant, a dispersant and deionized water into the stirred mixed solution, and performing electromagnetic stirring. According to the method disclosed by the invention, the Al2O3 sol is combined with the organic silica sol, and under an alkaline environment, and the Al2O3 sol and the organic silica sol are subjected to electromagnetic stirring with the surfactant, the oxidant, the dispersant and water to achieve a synergistic effect. The prepared polishing solution can avoid deep abrasion on a material while a high removal rate of the material is kept, surface roughness of the material after polishing is reduced, and the material is easy to clean.

Description

technical field [0001] The invention belongs to the technical field of sapphire surface treatment, and in particular relates to a preparation method of a sapphire magnetorheological mechanical polishing liquid. Background technique [0002] Sapphire is a kind of corundum gem, the chemical composition is Al 2 o 3 . Corundum in nature often contains Cr 3+ , Fe 3+ , Fe 2+ 、Ti 4+ , Mn 5+ and other impurity elements to produce various colors, the corundum containing a small amount of chromium ions is red, called ruby, in addition, other corundum gems are called sapphire. In the 10th century BC, sapphire was used as an ornament, mainly in jewelry and other industries. At the beginning of the 22nd century, sapphire was widely used in industrial engineering due to its stable chemical properties and excellent mechanical properties. [0003] At present, the main technology for sapphire ultra-smooth surface processing is chemical mechanical polishing. The precision and efficie...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02
CPCC09G1/02
Inventor 陆昌程杨华秦光临
Owner 江苏吉星新材料有限公司