A kind of anti-oxidation coating on the surface of carbon-silicon carbide composite material and its preparation method
An anti-oxidation coating and composite material technology, which is applied in the field of carbon-silicon carbide composite ceramic coatings, can solve the problems of high thermal stress, easy cracking, and mismatching thermal expansion coefficients of the coating, and achieve high-temperature oxidation resistance. Effect of reducing brittle fracture and improving fracture toughness
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[0056] (c) Fabrication method of vertical graphene arrays
[0057] In some preferred embodiments of the present invention, the vertical graphene array layer is grown on the surface of the carbon-silicon carbide composite material by plasma-assisted chemical vapor deposition.
[0058] Specifically, the method includes the following steps: placing the carbon-silicon carbide composite material in the cavity of a chemical vapor deposition device, vacuuming, purging, and programming the temperature, and then turning on the carbon source and the plasma generating device, and the carbon source is cracked into Plasma, the plasma is deposited on the carbon-silicon carbide composite material to obtain a vertical graphene array layer.
[0059] The number of layers of graphene can be controlled and adjusted through the deposition conditions, and the size is positively correlated with the deposition time. Vertical graphene with different sizes can be prepared by controlling the deposition ...
Embodiment 1
[0085] S1. Grind and polish the carbon-silicon carbide composite material with No. 400, No. 800 and No. 1000 sandpaper respectively, then clean it with absolute ethanol, and then dry it in an oven at 80°C. Step S1 can provide a clean s surface.
[0086] S2, using plasma-assisted chemical vapor deposition to deposit a vertical graphene array layer on the surface of the carbon-silicon carbide composite material, specifically including the following steps:
[0087] Place the carbon-silicon carbide composite material treated by S1 in the plasma chamber, close the chamber, and use a mechanical pump to draw a vacuum to make the pressure in the chamber reach 0.2mbar; open the argon gas for scrubbing, and adjust the flow rate of the argon gas to 200sccm. The control valve adjusts the pressure in the plasma chamber to 50mbar and keeps it stable; then the temperature is raised to 550°C through program control; after the temperature in the chamber is stabilized, turn off the argon gas; t...
Embodiment 2
[0091] S1. Grind and polish the carbon-silicon carbide composite material with No. 400, No. 800 and No. 1000 sandpaper respectively, then clean it with absolute ethanol, and then dry it in an oven at 80°C. Step S1 can provide a clean s surface.
[0092] S2, using plasma-assisted chemical vapor deposition to deposit a vertical graphene array layer on the surface of the carbon-silicon carbide composite material, specifically including the following steps:
[0093] Place the carbon-silicon carbide composite material treated by S1 in the plasma chamber, close the chamber, and use a mechanical pump to draw a vacuum to make the pressure in the chamber reach 0.2mbar; open the argon gas for scrubbing, and adjust the flow rate of the argon gas to 200sccm. The control valve adjusts the pressure in the plasma chamber to 50mbar and keeps it stable; then the temperature is raised to 650°C through program control; after the temperature in the chamber is stable, turn off the argon gas; 6. Tu...
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Abstract
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