Flexible water-jet guided laser micro-machining system and method

Abstract

The invention discloses a flexible water-jet guided laser micro-machining system and method. The flexible water-jet guided laser micro-machining system comprises an optical fiber transmission unit, aworkbench unit and a high-pressure liquid supply unit. The optical fiber coupling unit comprises an optical fiber fixing and switching module and a beam coupling transmission module. The beam couplingtransmission module comprises a coupling body, an upper pressure head and a lower nozzle holder. The end of a flexible optical fiber is fixed in a liquid cavity between the upper pressure head and the lower nozzle holder through the optical fiber fixing and switching module. A water inlet in the coupling body communicates with the liquid cavity. A nozzle block is arranged on the lower nozzle holder, and a spray hole in the nozzle block communicates with a nozzle on the lower nozzle holder. The coupling body is clamped on a manipulator of a robot. Stepless pressure-adjustable high-pressure water output by the high-pressure liquid supply unit is collected into the liquid cavity via water inlets to form a low-pressure stable water flow. The workbench unit comprises a three-axis linkage workbench. A clamping and fixing table board of workpieces is arranged on the workbench through a water tank. The flexible water-jet guided laser micro-machining system is simple, compact and flexible in structure, and multi-dimensional flexible micro-machining of the workpieces can be achieved.

Description

technical field [0001] The invention relates to laser processing technology, in particular to a water-conducting laser flexible micro-processing system and method. Background technique [0002] Water-guided laser technology uses water-beam fiber optics to transmit laser beams for processing. Combining the excellent characteristics of water jet and laser processing, it solves the problem of heat well. There is no thermal stress during processing, no heat-affected zone, no cutting With the advantages of clean road, no burr, no slag, no mechanical stress, etc., it can well meet the processing requirements of semiconductor, electronics, medical, aerospace and other high-precision devices. [0003] In the process of water-guided laser processing, the laser and the water beam fiber formed by the thin water beam are coupled and transmitted, which does not require real-time focusing due to the divergence of the traditional laser beam, which improves the depth and aspect ratio of the...

AI Technical Summary

Problems solved by technology

[0004] In the existing water-guided laser technology, most of the optical focusing elements are used to focus and couple the laser beam to process the workpiece, which has the problems of large overall structure and lack of processing flexibility.

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