Flexible water-jet guided laser micro-machining system and method

A flexible and micro-machining technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of large overall structure and lack of processing flexibility, and achieve the effect of simple connection, less microcracks, and compact connection

Pending Publication Date: 2020-03-17
GUILIN UNIV OF ELECTRONIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the existing water-guided laser technology, most of the optical focusing elements are used to focus and couple the laser beam to process the workpiece, which has the problems of large overall structure and lack of processing flexibility.

Method used

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  • Flexible water-jet guided laser micro-machining system and method
  • Flexible water-jet guided laser micro-machining system and method
  • Flexible water-jet guided laser micro-machining system and method

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Embodiment Construction

[0031] The technical solutions of the present invention will be further described below in conjunction with the embodiments shown in the accompanying drawings.

[0032] The water-conducting laser flexible micromachining system of the present invention includes a robot 8, an optical fiber transmission coupling unit 1, a workbench unit and a high-pressure liquid supply unit 2, and the robot 8, workbench unit and high-pressure liquid supply unit 2 are all existing Mature technology, the optical fiber transmission coupling unit 1 is the core of the present invention, including an assembled optical fiber fixed transfer module 3 and a beam coupling transmission module 4, such as figure 1 , figure 2 , image 3 shown.

[0033] The beam coupling transmission module 4 includes a coaxial coupling body 4-1, an upper pressure head 4-2, a pressure plate 4-4 and a lower nozzle seat 4-3, and a coaxial coupling body 4-1 is provided inside. Connected upper fine thread inner hole and lower s...

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PUM

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Abstract

The invention discloses a flexible water-jet guided laser micro-machining system and method. The flexible water-jet guided laser micro-machining system comprises an optical fiber transmission unit, aworkbench unit and a high-pressure liquid supply unit. The optical fiber coupling unit comprises an optical fiber fixing and switching module and a beam coupling transmission module. The beam couplingtransmission module comprises a coupling body, an upper pressure head and a lower nozzle holder. The end of a flexible optical fiber is fixed in a liquid cavity between the upper pressure head and the lower nozzle holder through the optical fiber fixing and switching module. A water inlet in the coupling body communicates with the liquid cavity. A nozzle block is arranged on the lower nozzle holder, and a spray hole in the nozzle block communicates with a nozzle on the lower nozzle holder. The coupling body is clamped on a manipulator of a robot. Stepless pressure-adjustable high-pressure water output by the high-pressure liquid supply unit is collected into the liquid cavity via water inlets to form a low-pressure stable water flow. The workbench unit comprises a three-axis linkage workbench. A clamping and fixing table board of workpieces is arranged on the workbench through a water tank. The flexible water-jet guided laser micro-machining system is simple, compact and flexible in structure, and multi-dimensional flexible micro-machining of the workpieces can be achieved.

Description

technical field [0001] The invention relates to laser processing technology, in particular to a water-conducting laser flexible micro-processing system and method. Background technique [0002] Water-guided laser technology uses water-beam fiber optics to transmit laser beams for processing. Combining the excellent characteristics of water jet and laser processing, it solves the problem of heat well. There is no thermal stress during processing, no heat-affected zone, no cutting With the advantages of clean road, no burr, no slag, no mechanical stress, etc., it can well meet the processing requirements of semiconductor, electronics, medical, aerospace and other high-precision devices. [0003] In the process of water-guided laser processing, the laser and the water beam fiber formed by the thin water beam are coupled and transmitted, which does not require real-time focusing due to the divergence of the traditional laser beam, which improves the depth and aspect ratio of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/14B23K26/142B23K26/146B23K26/70
CPCB23K26/146B23K26/1435B23K26/142B23K26/702B23K26/703
Inventor 龙芋宏黄宇星杨林帆梁恩周嘉赵要武刘清原焦辉赵钰涣单晨
Owner GUILIN UNIV OF ELECTRONIC TECH
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