Preparation scheme of novel high-transmittance vanadium dioxide thin film element
A technology of vanadium dioxide and high transmittance, which is applied in the field of physics, can solve the problems of low transmittance of thin films, achieve the effect of increasing transmittance, reducing dependence, and reducing the probability of defect generation
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[0047] Example 1
[0048] This embodiment provides a vanadium dioxide double-layer membrane element. The vanadium dioxide double-layer membrane element includes a vanadium dioxide double-layer membrane system and an element substrate supporting the vanadium dioxide double-layer membrane system.
[0049] The specific steps of the preparation method of the vanadium dioxide double-layer membrane element are as follows:
[0050] Step 1. Theoretical design optimizes the spectral performance of the vanadium dioxide double-layer film system
[0051] The existing film analysis software is used to analyze the influence trend and change law of the sputtering process parameters on the properties of the graded refractive index material and the properties of the vanadium dioxide thin film, so as to evaluate the process preparation tolerance; The required refractive index distribution of the graded refractive index material thin film layer prepared by the process; on this basis, the vanadium dioxid...
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