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Flexible substrate and preparation method thereof

A flexible substrate and substrate technology, which is applied in the direction of final product manufacturing, climate sustainability, sustainable manufacturing/processing, etc., can solve the problems of poor film bending, poor adhesion, and the inability of traditional flexible substrates to meet the needs of use.

Active Publication Date: 2020-04-21
WGTECH JIANGXI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the adhesion of the traditional flexible substrate is poor, the film layer is easy to crack, and the film layer is poor in bending, so that the traditional flexible substrate cannot meet the requirements of the application.

Method used

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  • Flexible substrate and preparation method thereof
  • Flexible substrate and preparation method thereof
  • Flexible substrate and preparation method thereof

Examples

Experimental program
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preparation example Construction

[0035] see figure 2 , the preparation method of the flexible substrate of an embodiment comprises the following steps:

[0036] Step S210: providing a substrate.

[0037] Wherein, the substrate is a polyethylene terephthalate (PET) film substrate or a polyimide (PI) film substrate. The thickness of the substrate is 0.01 mm to 0.50 mm.

[0038] Further, after providing the substrate, a step of cleaning the substrate is also included. Specifically, the step of cleaning the substrate includes: scrubbing the substrate, then ultrasonically cleaning the substrate with deionized water and ultrasonic cleaning with alcohol, and finally drying the substrate in alcohol vapor. When the substrate is removed from the alcohol vapor, the substrate is quickly dried completely because the condensed vapor evaporates from the surface.

[0039] Further, alcohol is used to scrub the substrate to preliminarily remove dust and oil stains on the surface of the substrate, so as to avoid affecting ...

Embodiment 1

[0071] The preparation process of the flexible substrate of this embodiment is as follows:

[0072] (1) Scrub the substrate with alcohol, then place it in deionized water for ultrasonic cleaning for 3 minutes with an ultrasonic power of 1000W, and then place it in alcohol for ultrasonic cleaning for 3 minutes with an ultrasonic power of 1000W. After sonication, the substrate was dried in alcohol vapor. Wherein, the substrate is a PET film substrate, and the thickness of the substrate is 0.12mm.

[0073] (2) Place the substrate cleaned in step (1) on the jig, and process it with a cold trap device at -130° C. for 1 min.

[0074] (3) The substrate processed by the cold trap is placed in the No. 1 sputtering chamber, and the graphene is used as the target material to perform sputtering on the substrate in a mixed atmosphere of dry air and argon. Among them, the voltage is 300V, the bias voltage is -70V, the power is 550W, the target distance is 40mm, and the vacuum degree is 2....

Embodiment 2

[0078] The preparation process of the flexible substrate of this embodiment is as follows:

[0079] (1) Scrub the substrate with alcohol, then place it in deionized water for ultrasonic cleaning for 4 minutes with an ultrasonic power of 1500W, and then place it in alcohol for ultrasonic cleaning for 4 minutes with an ultrasonic power of 1500W. After sonication, the substrate was dried in alcohol vapor. Wherein, the substrate is a PET film substrate, and the thickness of the substrate is 0.12 mm.

[0080](2) Place the substrate cleaned in step (1) on the jig, and process it with a cold trap device at -145° C. for 3 minutes.

[0081] (3) The substrate processed by the cold trap is placed in the No. 1 sputtering chamber, and the graphene is used as the target material to perform sputtering on the substrate under the atmosphere of dry air and argon. Among them, the voltage is 350V, the bias voltage is -95V, the power is 950W, the target distance is 75mm, and the vacuum degree is...

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Abstract

The invention relates to a flexible substrate and a preparation method thereof. The flexible substrate comprises a substrate and a coating layer stacked on the substrate, wherein the coating layer comprises a first graphene layer, a first ITO layer, a second graphene layer and a second ITO layer which are stacked in sequence, and the first graphene layer is stacked on the substrate. The adhesion between the substrate and the coating layer in the flexible substrate is good, it is not prone to cracking, and the bending property of the flexible substrate is good.

Description

technical field [0001] The invention relates to the technical field of flexible display, in particular to a flexible substrate and a preparation method thereof. Background technique [0002] Curved surface technology has made great progress in the field of display. Whether it is a curved mobile phone, a curved TV, or a curved display, it is favored by the market and users. Curved surfaces are not the ultimate goal of display technology development, and flexible displays that can be bent at will are the future trend of the industry. The difference between flexible screens and traditional liquid crystal displays is that flexible screens use OLED technology instead of liquid crystals to emit light, and use plastic substrates instead of traditional glass substrates to achieve a "flexible" effect. Especially for new fields in the future display industry: VR and wearable smart devices, flexible technology is even more important. Both flexible display technology and flexible disp...

Claims

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Application Information

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IPC IPC(8): H01L51/52H01L51/56C23C14/06C23C14/08C23C14/34
CPCC23C14/3464C23C14/086C23C14/0605H10K77/111H10K71/00Y02P70/50
Inventor 易伟华张迅郑芳平周慧蓉杨会良刘明礼刘松林周成阳威孔线宁何智斌
Owner WGTECH JIANGXI
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