Carbon-based composite film and preparation method thereof

A composite film and carbon-based technology, applied in the field of surface engineering, can solve the problems of increasing the friction coefficient of the film, abrasive wear, and deterioration of tribological properties

Active Publication Date: 2020-04-28
LANZHOU UNIVERSITY OF TECHNOLOGY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, although the nano-multilayer structure design can significantly improve the strength and toughness of this type of composite film, the metal carbide hard particles at the sliding interface increase th...

Method used

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  • Carbon-based composite film and preparation method thereof
  • Carbon-based composite film and preparation method thereof
  • Carbon-based composite film and preparation method thereof

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preparation example Construction

[0027] The invention provides a method for preparing a carbon-based composite film, comprising the following steps:

[0028] Activating the metal substrate to obtain an activated metal substrate;

[0029] Using metal targets, carbon targets and metal carbide targets as sputtering targets, performing closed-field unbalanced magnetron sputtering on the activated metal substrate to form a gradient transition layer;

[0030] Using a carbon target and a metal carbide target as a sputtering target, performing magnetron deposition on the surface of the gradient transition layer to form a nano-multilayer-nano-composite double structure to obtain the carbon-based composite film;

[0031] When the rotational speed of the sample turret of the magnetron deposition is 0.5-5 rpm, a nano-multilayer structure is formed; when the rotational speed of the sample turret of the magnetron deposition is 5-8 rpm, a nanocomposite structure is formed;

[0032] The metal carbide targets are all Cr 3 C...

Embodiment 1

[0054] Concrete preparation method comprises the following steps:

[0055] (1) Presetting of the sputtering plane target: ensure that the metal substrate fixed on the sample turret is kept parallel to the surface of the sputtering target, and the distance between the two is kept at 10 cm, and the C target and the WC target are placed opposite to each other.

[0056] (2) Substrate polishing and cleaning: Grind and polish the surface of the 316L stainless steel substrate step by step to a surface roughness Ra≤0.2 μm, and then ultrasonically clean it with acetone and absolute ethanol for 20 minutes at an ultrasonic power of 600W and a temperature of 25°C, respectively. After drying with nitrogen gas, fix it on the sample turntable.

[0057] (3) Activation of the substrate surface: when the vacuum degree of the closed-field unbalanced magnetron sputtering deposition chamber reaches 5×10 -4 Pa, pass high-purity argon gas, the air pressure is controlled at 2.0Pa, and the surface of...

Embodiment 2

[0066] Concrete preparation method comprises the following steps:

[0067] (1) Presetting of the sputtering plane target: ensure that the metal substrate fixed on the sample turret is kept parallel to the surface of the sputtering target, and the distance between the two is kept at 10 cm, and the C target and the WC target are placed opposite to each other.

[0068] (2) Substrate polishing and cleaning: Grind and polish the surface of the 316L stainless steel substrate step by step to a surface roughness Ra≤0.2 μm, and then ultrasonically clean it with acetone and absolute ethanol for 20 minutes at an ultrasonic power of 600W and a temperature of 25°C, respectively. After drying with nitrogen gas, fix it on the sample turntable.

[0069] (3) Activation of the substrate surface: when the vacuum degree of the closed-field unbalanced magnetron sputtering deposition chamber reaches 5×10 -4 Pa, pass high-purity argon gas, the air pressure is controlled at 2.0Pa, and the surface of...

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Abstract

The invention provides a carbon-based composite film and a preparation method thereof, and belongs to the field of surface engineering. According to the carbon-based composite film and the preparationmethod thereof, a carbon target and a metal carbide target serve as a sputtering target material, based on closed field unbalanced magnetron sputtering plasma space distribution characteristics and the rule of influence of the rotation speed of a sample rotating stand on a film structure, only through cyclic control over high-speed and low-speed rotation of the sample rotating stand, and the double-structure carbon-based composite film comprising both a nanolayer structure and a nano composite structure is spontaneously formed in the deposition process; the carbon target and the metal carbidetarget are oppositely arranged in a vacuum cavity, when the rotation speed of the rotating stand is high, a composite film with the nano composite structure is deposited out, and when the rotation speed of the rotating stand is low, a composite film with a nano multi-layer structure is deposited out; and the size of nanocrystalline in the nano composite structure and the modulation period of thenano multi-layer structure can be achieved through adjusting of the rotation speed of the rotating stand, and the thickness of a nano composite structure layer and the thickness of a nano multi-layerstructure layer can be achieved by controlling the time for cyclic adjustment of the rotation speed of the sample rotating stand.

Description

technical field [0001] The invention relates to the technical field of surface engineering, in particular to a carbon-based composite film and a preparation method thereof. Background technique [0002] Diamond-like carbon-based film is currently the only solid lubricating film material with high hardness and self-lubricating properties. The carbon-based film integrated with toughness and lubrication is an important guarantee for the reliable and long-life operation of key parts of mechanical equipment under severe working conditions such as heavy load, high speed, and impact. However, the hardness and toughness of carbon-based films check and balance each other. How to realize the combination of high hardness, high toughness, low friction and low wear of diamond-like carbon-based films is a recognized key technical problem in this field. [0003] In the process of improving the comprehensive performance of diamond-like carbon-based films, film structure regulation and mult...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06C23C14/54C23C14/50
CPCC23C14/0605C23C14/0688C23C14/352C23C14/505C23C14/54
Inventor 何东青李文生尚伦霖张广安翟海民张辛健
Owner LANZHOU UNIVERSITY OF TECHNOLOGY
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