Sampling system for tungsten hexafluoride metal element analysis and using method thereof

Abstract

The invention discloses a sampling system for tungsten hexafluoride metal element analysis and a using method thereof. The sampling system comprises a tungsten hexafluoride container, a high-purity gas source, a sampling device, a vacuum device, a valve and a pipeline, and is characterized in that a collecting device is arranged between the sampling device and the vacuum device. The use method ofthe sampling system comprises the following steps: (1) evacuating the collecting device; (2) replacing and evacuating a sampling device; (3) sampling tungsten hexafluoride; and (4) recovering tungstenhexafluoride. Residues in the sampling device are samples for analyzing tungsten hexafluoride metal elements. Tungsten hexafluoride in the pipeline and the sampling device of the sampling system volatilizes to the collecting device through negative pressure, the system has no dead angle, the sampling pipeline and the sampling device are provided with heating devices, and volatilization and collection are complete and thorough.

Description

technical field [0001] The invention relates to a sampling system for analyzing tungsten hexafluoride metal elements and a use method thereof, which can be applied to sample preparation for analysis of tungsten hexafluoride metal elements. Background technique [0002] As one of the indispensable basic and supporting materials in the production of electronic industries such as VLSI, flat-panel display devices, compound semiconductor devices, solar cells, and optical fibers, electron gases are widely used in thin films, etching, doping, and vapor deposition. , Diffusion and other processes. With the rapid development of the industry, the electronics industry has higher and higher requirements for the purity of electronic gases. Tungsten hexafluoride is mainly used in the metal tungsten chemical vapor deposition process in the electronics industry, and WSi made of it 2 It can also be used as a wiring material for large-scale integrated circuits, and can also be used as a raw...

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Problems solved by technology

In this way of sampling, the volatilized tungsten hexafluoride is absorbed by the lye and converted into tungstate, and the product is wasted; the outlet of the sampler is directly connected to the lye absorption bottle, the system has high moisture, and the volatilized tungsten hexafluoride and water vapor are sampled The reaction in the container generates tungstic acid, which affects the continuous volatilization of tungsten hexafluoride; the tungsten hexafluoride heated and volatilized by the sampler is absorbed by multi-stage lye, with high resistance and slow volatilization. When the volatilization speed is too slow, the vapor phase tungsten hexafluoride React with lye to form negative pressure in local space, there is a risk of lye regurgitation leading to sampling failure, and there is a risk of leakage by increasing the heating temperature; the sample volume of the weighing sampler controls the time of closing the cylinder valve, and the stability of the sample volume Higher than the volumetric method; the heat release in the absorption process will cause the lye in the absorption bottle to volatilize, and the helium gas purging will take away part of the volatilized lye. There is a large error in calculating the weight gain of the lye absorption solution for each weighing; it takes about 6 hours to complete a sample preparation, which takes a long time

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