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Processing method of flexible vibration sensor for monitoring Parkinson syndrome

A technology of vibration sensor and processing method, applied in the direction of sensor, application, diagnostic recording/measurement, etc., can solve the problem of reducing the sensitivity of bending sensor, and achieve the effect of low power consumption, low cost and high stability

Active Publication Date: 2020-05-15
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the existence of defects and gaps, the solid film can only withstand bending in a small range, and the network structure reduces the sensitivity of the bending sensor due to the strong interaction between the nanowires.

Method used

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  • Processing method of flexible vibration sensor for monitoring Parkinson syndrome
  • Processing method of flexible vibration sensor for monitoring Parkinson syndrome
  • Processing method of flexible vibration sensor for monitoring Parkinson syndrome

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039]Embodiment 1: A method for processing a flexible vibration sensor for monitoring Parkinson's syndrome, comprising the following steps: spin-coating photoresist: dropping positive photoresist AZ5214 on a high-temperature-resistant substrate, which is a silicon substrate , Spin-coat on a high-temperature-resistant substrate at a rotation rate of 3000rpm for 30 seconds, spin-coat to form a photoresist film with a thickness of 1um, and then bake it on a hot plate at a temperature of 90°C for 2 minutes to cure the photoresist to obtain coating Plate; Exposure: Carry out lithographic exposure to the glue-coated plate, place a mask plate engraved with a base pattern on the lithography machine, the pattern on the mask plate is transparent, and the non-pattern is opaque; the photoresist plate is placed on the Photolithographic exposure under the mask plate to obtain a patterned modified rubber-coated plate; development: use a photoresist developer to develop the patterned modified...

Embodiment 2

[0040] Embodiment 2: A method for processing a flexible vibration sensor for monitoring Parkinson's syndrome, comprising the following steps: spin-coating photoresist: dropping positive photoresist on a high-temperature-resistant substrate, and the high-temperature-resistant substrate is Si / SiO2 The substrate is spin-coated to form a photoresist film with a thickness of 5um, and then baked on a hot plate at a temperature of 100°C for 5 minutes to cure the photoresist to obtain a coated board; exposure: perform photolithography exposure on the coated board, Place the mask plate engraved with the base pattern on the photolithography machine, the pattern on the mask plate is transparent, and the non-pattern part is opaque; the photoresist plate is placed under the mask plate for photolithographic exposure to obtain patterned modification Coated board; development: use photoresist developer to develop the patterned modified rubberized board to obtain a developed board, and the patt...

Embodiment 3

[0041] Embodiment 3: A method for processing a flexible vibration sensor for monitoring Parkinson's syndrome, comprising the following steps: spin-coating photoresist: dropping negative photoresist on a high-temperature-resistant substrate, the high-temperature-resistant substrate is a quartz substrate, Spin coating to form a photoresist film with a thickness of 10um, and then bake it on a hot plate at a temperature of 120°C for 10 minutes to cure the photoresist to obtain a coated board; exposure: perform photolithographic exposure on the coated board. A mask plate engraved with a base pattern is placed on the machine, and the pattern on the mask plate is opaque, while the non-pattern area is light-transmitting; the photoresist plate is placed under the mask plate for photolithographic exposure to obtain a patterned modified rubber-coated plate ;Development: Use a photoresist developer to develop the patterned modified rubber-coated plate to obtain a developing plate; Evaporat...

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Abstract

The invention discloses a processing method of a flexible vibration sensor for monitoring Parkinson syndrome. The processing method includes the following steps of spin-coating photoresist, exposure,development, evaporation Ni film, removing glue and cleaning, growing CA self-crosslinking array, transferring to flexible substrate, clean and stripping, and sensor production. The flexible vibrationsensor produced by the processing method has the advantages of low power consumption, high stability and high sensitivity, so that the flexible vibration sensor has huge application potential in wearable health monitoring and has great potential in the direction of manufacturing low-cost and durable flexible sensors.

Description

technical field [0001] The invention relates to the field of flexible electronics, in particular to a processing method for a flexible vibration sensor used for monitoring Parkinson's syndrome. Background technique [0002] Parkinson's disease is an important public health burden in the world's aging population today. Monitoring relevant physiological signals through portable medical sensors is a low-cost and convenient method for diagnosing Parkinson's disease. Among them, thin-film electronics have played an important role in the application of flexible medical sensors, and their common features are solid thin films and mesh structures. However, due to the existence of defects and gaps, the solid film can only withstand bending in a small range, and the network structure reduces the sensitivity of the bending sensor due to the strong interaction between nanowires. There is an urgent need to find new materials and technologies for flexible and portable sensing electronics...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/00A61B5/11
CPCA61B5/1101A61B5/4082A61B5/6802
Inventor 王学文樊宇波高久伟赵武黄维
Owner NORTHWESTERN POLYTECHNICAL UNIV
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