Preparation and characterization method of a precious metal ultrafine wire material ebsd test sample

Abstract

The invention relates to a method for preparing and characterizing a precious metal ultrafine wire EBSD test sample. In the present invention, the precious metal ultra-fine wire sample is stretched and bonded to the top of the inclined surface of the double-tilt sample stage, placed in the sample chamber to select the sample section preparation and testing area; the sample stage is tilted, and the sample in the field of view is subjected to carbon plating treatment, Ion beam cutting and ion beam surface polishing process to obtain a cross-sectional observation sample of noble metal ultra-fine wire without surface stress, observe through ion beam channel contrast imaging and obtain the microstructure morphology image of the wire cross-sectional observation area; The sample stage is tilted until the angle between the observation section and the incident electron beam is 70°, and the electron backscattering diffraction detection is performed on the ultrafine wire section through the CCD detector, and the EBSD image and crystallographic information of the micro-area section of the sample are obtained. The combination of the EBSD and the ion beam channel contrast image of the present invention provides more systematic and comprehensive data support for the micro-area analysis of the precious metal ultra-fine wire, and can expand the comprehensive analysis range of samples.

Description

technical field [0001] The invention relates to a preparation and characterization method of a precious metal superfine wire EBSD test sample, belonging to the technical field of precious metal superfine wire testing. Background technique [0002] Precious metal ultra-fine wires are often used in the key positions of precision electronic functional devices, but due to the fine size of the finished products (diameter <φ0.1mm), traditional techniques cannot characterize the microstructure of ultra-fine wires, and alloy sheet structures are usually used to indirectly Infer the microstructure evolution law of materials. However, there are large structural differences between the wire and the sheet during the deformation process, and this characterization method cannot accurately and objectively reflect the real tissue structure. The lack of accuracy has hindered the research work on recrystallization structure analysis of noble metal ultra-fine wire, phase identification and...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems existing in the prior art, the present invention provides a preparation and characterization method of precious metal ultra-fine wire EBSD test samples. Before the EBSD surface scanning and collection of the Kikuchi line, the present invention uses channel contrast imaging to observe the grain size and find defects. Dislocation structures, twin boundaries, and deformation bands are characterized, and then EBSD technology is used to calibrate the crystal orientation of the area of ​​interest; the combination of EBSD and channel contrast images improves the spatial resolution of EBSD Therefore, the present invention can solve the problems that traditional technical methods cannot accurately characterize the recrystallization structure of precious metal ultra-fine wire, phase identification and thickness measurement of ultra-fine composite wire, preferred orientation of twins, grain boundary distribution, etc.

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