Preparation method for copper rotating target material
A technology of rotating target and copper powder, applied in the field of sputtering targets, can solve the problems of uneven structure and performance of extruded products, uneven structure and performance of target materials, uneven metal fluidity, etc., and achieves good structure consistency and copper The powder has the effect of high powder coating rate and convenient operation.
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[0026] A method for preparing a copper rotating target, comprising the following steps:
[0027] (1) prepare copper powder;
[0028] (2) Sandblasting the surface of the back pipe;
[0029] (3) Install the back pipe after sandblasting on the frame, the frame drives the back pipe to rotate and move axially, set the cold spraying process parameters, and spray the copper powder to the surface of the back pipe through a spray gun to form Copper coating, after the copper coating reaches the required thickness, a copper rotating target is obtained.
[0030] Compared with the existing integral extrusion molding method, the present invention uses the cold spraying process to prepare the copper rotating target, the preparation process is simple, the operation is convenient, and the size of the target and the thickness of the coating are not limited, the density of the target is high, and the copper powder The comprehensive powder feeding rate is high, which is suitable for large-scale...
Embodiment 1
[0043] A method for preparing a copper rotating target, comprising the following steps:
[0044] (1) preparing average particle diameter is 15 μ m, and the copper powder of oxygen content is less than 1000ppm;
[0045] (2) A 304 stainless steel back tube with a length of 800 mm, an inner diameter of 125 mm, and an outer diameter of 133 mm is used, and the back tube is sandblasted so that the surface roughness Ra of the back tube is 13 μm;
[0046] (3) Install the back pipe after sand blasting on the frame, the frame drives the back pipe to rotate and move axially, the rotating speed of the back pipe is 15r / min, and the axial movement speed of the back pipe is 60mm / min;
[0047] The spray gun is installed 45mm above the central axis of the back tube, and the step-up distance is 0.25mm / time (the back tube moves back and forth axially once);
[0048] Set the cold spraying process parameters: the temperature at the outlet of the spray gun is 530°C, the powder feeding pressure is ...
Embodiment 2
[0050] A method for preparing a copper rotating target, comprising the following steps:
[0051] (1) preparing average particle diameter is 45 μ m, and the copper powder of oxygen content is less than 1000ppm;
[0052](2) Adopt a titanium back tube with a length of 1600 mm, an inner diameter of 125 mm, and an outer diameter of 133 mm, and perform sandblasting on the back tube so that the surface roughness Ra of the back tube is 10 μm;
[0053] (3) Install the back pipe after sandblasting on the frame, the frame drives the back pipe to rotate and move axially, the rotating speed of the back pipe is 25r / min, and the axial movement speed of the back pipe is 60mm / min;
[0054] The spray gun is installed 55mm above the central axis of the back tube, and the step-up distance is 0.5mm / time (the back tube moves back and forth axially once);
[0055] Set the process parameters of cold spraying: the temperature at the outlet of the spray gun is 590°C, the powder feeding pressure is 4.7...
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