Laser beam splitter

Abstract

The invention discloses a laser beam splitter, which comprises a plurality of head crown-shaped structures arranged in an array, and is characterized in that each head crown-shaped structure comprisesa continuous spline curved surface and two steep cliff walls which are symmetrically arranged by taking the mass center of the spline curved surface as the center. According to the invention, the problem that since a traditional binary step type diffractive optical device can only utilize first-stage diffraction, the diffraction angle is limited by the characteristic size is overcome; by adoptinga tiny three-dimensional head crown surface type structure array is adopted, a plurality of diffraction orders generated thereby form a laser beam splitting pattern, so that the angle of the diffraction device is large, and characteristic size of the structural plane is greatly reduced; on the other hand, the uniformity of laser beam splitting energy is good due to three-dimensional distributionof the head crown surface type, and central zero-order energy is not sensitive to the depth error of the structure; and compared with the traditional binary diffraction device, the laser beam splitteris larger in structural machining tolerance.

Description

technical field [0001] The invention relates to the field of optical devices, in particular to a laser beam splitter. Background technique [0002] Laser beam splitting optical devices have a wide range of applications in the fields of laser rapid processing, structured light three-dimensional measurement, laser radar, optical communication and stage display. The current laser beam splitter is mainly a binary step-type diffractive optical element. By marking two-dimensional gratings with different discrete steps on the optical plane, the discrete two-dimensional gratings with different depths can produce different phase modulations. field produces a diffraction pattern. However, due to the constraints of existing design methods, this stepped diffraction device can only use the first-order diffraction, and the divergence angle of the diffraction pattern is determined by the characteristic size of the diffraction structure. Therefore, if a stepped diffraction device is used t...

AI Technical Summary

Problems solved by technology

However, due to the constraints of existing design methods, this stepped diffraction device can only use the first-order diffraction, and the divergence angle of the diffraction pattern is determined by the characteristic size of the diffraction structure. Therefore, if a stepped diffraction device is used to obtain a large angle Diffraction patterns require extremely small feature sizes, which not only require harsh device processing conditions, but also the central zero-order diffracted light intensity is very sensitive to the error of the step processing depth and the wavelength of the incident light, and subtle depth errors or wavelength shifts will Introduces a strong central zero-order diffraction, which greatly limits the application of the device

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