Preparation method of light-emitting device and light-emitting device
A light-emitting device, electroluminescent layer technology, applied in optics, nonlinear optics, semiconductor/solid-state device manufacturing, etc., can solve the problems of limited improvement range of electrical characteristics, need for additional components, low field-effect mobility, etc. The effect of improving electrical properties, reducing interface scattering, and high mobility
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[0042] For better understanding, figure 1 It is a schematic diagram of steps of a method for preparing a light-emitting device according to an embodiment of the present invention, such as figure 1 As shown, a method for preparing a light-emitting device includes the following steps:
[0043] providing a flexible first substrate 1,
[0044] A flexible substrate 2 is stacked on the flexible first substrate 1,
[0045]Aluminum oxynitride is sputtered on the flexible substrate 2 to form a first insulating film 3, silicon oxide is deposited on a first predetermined region of the first insulating film 3 to form a second insulating film, and silicon oxide is formed into a second insulating film. Oxygen can be supplied to the amorphous oxide semiconductor film 4 during filming, and oxygen vacancies in the film can be filled to improve characteristics.
[0046] After heating the second insulating film to a predetermined temperature, an amorphous oxide semiconductor film 4 is formed ...
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