Preparation method of organic crystalline film, and organic field effect transistor

Abstract

The invention provides a preparation method of an organic crystalline film, and an organic field effect transistor. The preparation method comprises the following steps: providing a silicon monoxide wafer as a substrate, and arranging an insulating layer on the substrate; forming a positive photoresist channel array on the surface of the insulating layer through a photoetching technology, whereinthe end portion of the positive photoresist channel array is in a periodically changing funnel shape and is used for filtering crystal orientation, so that crystals with the same orientation epitaxially grow along the two sides of the funnel shape and enter the positive photoresist channel array; performing hydrophilic and hydrophobic treatment on the positive photoresist channel array to obtain hydrophilic and hydrophobic templates with different hydrophilic and hydrophobic properties on the substrate; and spreading an organic single crystal small molecule solution on the hydrophilic and hydrophobic templates by using a scrap coating method to obtain the organic crystalline film with consistent crystal orientation. According to the preparation method of the organic crystalline film, directional positioning growth of high-orientation organic single crystals in a large-area range can be realized, and the preparation method is simple to operate, easy to control and beneficial to large-area popularization and application.

Description

technical field [0001] The invention relates to the technical field of semiconductor device manufacturing, in particular to a preparation method of an organic crystalline thin film and an organic field effect transistor. Background technique [0002] Highly oriented organic single crystals have the advantages of highly ordered molecular packing and fewer defects, which can realize rapid carrier transport. Moreover, improving the orientation of the crystal can significantly improve the device performance of the organic field effect transistor, and improve the stability and repeatability of the device. [0003] At present, a variety of organic single crystal growth techniques have been developed, such as interfacial self-assembly, physical vapor deposition (PVD), microstructure-induced crystallization, template-confined spin coating, inkjet printing, and solution pulling. , Solution scraping method, etc. Among them, the physical vapor deposition method is recognized as a pre...

AI Technical Summary

Problems solved by technology

Among them, the physical vapor deposition method is recognized as a method for preparing organic single crystals with high crystallinity and high quality, but the crystal growth position and orientation are relatively random.

The inkjet printing method can achieve fixed-point growth of organic single crystals, but the resolution is low, and it is difficult to achieve consistent orientation of each single crystal

[0004] In short, the existing above-mentioned preparation methods all have certain defects in the preparation of highly oriented organic single crystals, and it is difficult to maintain the orientation consistency of the organic crystals in the array or to achieve the consistency of the orientation of large-area organic crystals.

Images