Nitrogen dioxide sensor based on two-dimensional molybdenum disulfide nano material

Abstract

The invention discloses a nitrogen dioxide sensor based on a two-dimensional molybdenum disulfide nano material. A molybdenum disulfide material is used as a sensing material, a source electrode and adrain electrode are arranged on the two sides of the molybdenum disulfide material, an ultraviolet optical filter is arranged above the molybdenum disulfide material, gas input and output channels are arranged on the two sides of the sensor, and lead wires of the source electrode and the drain electrode extend out of the two sides of the sensor. The sensor size reaches the um level, and the processing technology is compatible with the semiconductor technology; the power consumption of a chip is only fW level, and the chip can be integrated in a mobile phone and other portable electronic devices. The sensor is characterized in that under the irradiation of ultraviolet light, NO2 gas diffuses to the surface of MoS2, electrons in MoS2 are transferred to the NO2 gas, a rear-end current sampling circuit captures the conductivity change of MoS2, and quantitative measurement of the concentration of NO2 is realized.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, and more specifically relates to a novel two-dimensional nanomaterial-based micro, low power consumption, ultra-high sensitivity, ultra-fast recovery NO 2 sensor chip. Background technique [0002] NO 2 Gas is a common chemical gas discharge from factories. If its concentration exceeds 1ppm, it will cause permanent damage to the human respiratory system; secondly, oxygen and oxygen compounds, such as NO2 and NO, can be used as lung tissue infection and gastrointestinal disorders. Exhaled breath markers, the concentration of which is in the order of ppb. Therefore, realizing ultra-high sensitivity detection of NO2 gas is of great significance in industry and clinical medicine. [0003] Currently popular NO in the market 2 The gas sensor is a sensor based on metal oxide semiconductors. This type of sensor integrates a micro heater and a sensing surface to achieve high sensitivity and rapid ...

AI Technical Summary

Problems solved by technology

However, there are the following problems: (1) This type of sensor needs to integrate a micro-heater separately, the process is complicated, the working temperature reaches 200 degrees Celsius, and the power consumption is large; (2) It is difficult to achieve ultra-low concentration (ppb level) NO2 detection, which limits its Application in clinical medical testing

due to NO 2 Gas is a strong oxidizing gas, adsorbed on the surface of two-dimensional materials, it is difficult to desorb without heating, resulting in a slow recovery speed of this type of gas sensor, which affects the secondary use of the sensor

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