STM-MBE combined system

Abstract

The invention discloses an STM-MBE combined system. The STM-MBE combined system involves a sample injection cavity, a sample preparation cavity, a sample characterization cavity, a supporting table and a baking system; the characterization cavity is a commercial STM sample injection cavity which is directly purchased, samples can be well dissociated and transferred in the sample injection cavity,and some small molecules which are prone to pollute vacuum can be deposited in the sample injection cavity; the preparation cavity adopts reserved circular windows which are symmetrically arranged below are used for allowing evaporation sources to be placed, and seven evaporation sources can be placed at the same time at a time; in addition, the preparation cavity adopts the mode that a molecularpump is directly arranged behind an ion pump so that direct pumping of the molecular pump to the preparation cavity can be achieved, and the vacuum degree of the preparation cavity is improved; meanwhile, compared with a previous preparation cavity, more windows are reserved in the preparation cavity, so that the preparation cavity has more upgrading space and the possibility of changing accordingto experimental requirements; and the baking system adopts a baking mode of the external sample injection cavity, and a baking plate adopts a double-door design and is easy to disassemble and assemble. The STM-MBE combined system has more self-assembly space.

Description

technical field [0001] The invention belongs to the field of ultra-high vacuum equipment, and in particular relates to an STM-MBE combined system. Background technique [0002] In recent years, as the influence of low-dimensional materials in electronic devices has gradually become prominent, we have paid more and more attention to the research on the surface structure and surface interface of low-dimensional materials. Scanning tunneling microscopy (STM) plays an important role in this. In the research of low-dimensional materials, we generally use molecular beam epitaxy (MBE) to synthesize low-dimensional materials, and then use STM to characterize and study low-dimensional materials. The STM-MBE combined system needs to operate in an ultra-high vacuum environment. According to the range of vacuum degree, usually it can be divided into rough vacuum (10 5 -10 3 Pa), low vacuum (10 3 -10 -1 Pa), high vacuum (10 -1 -10 - 6 Pa), ultra-high vacuum (10 -6 -10 -10 Pa) ...

AI Technical Summary

Problems solved by technology

For example, the sampling cavity of the existing instrument system is generally evacuated in the form of a molecular pump shared with the preparation cavity, which is relatively poor in independence, the vacuum degree is not good enough, and it must be baked together with the sampling cavity when baking , which is unnecessary and wastes baking space with efficiency

The preparation cavity is too single in function, and there are too few connection openings reserved, so that we have more experimental needs to improve and upgrade the space of the instrument system. In addition, too few evaporation source interfaces make it impossible to engage in too complicated sample growth. , and sometimes due to insufficient evaporation source locations, too few evaporation sources are installed at one time. In order to switch the evaporation source, the vacuum state of the cavity can only be stopped, so that the cavity is exposed to the atmosphere, and the evaporation source is replaced, which is time-consuming and laborious.

Moreover, due to the position of the manipulator and the transfer rod, in order to transfer the sample from the sample chamber to the preparation chamber, it is necessary to add a special manipulator with a rotating clamp to the transfer rod of the sample chamber, which complicates the instrument system , and increased cost

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