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Large-aperture optical system MTF measuring device and method

An optical system and measurement device technology, applied in the field of optical detection, can solve problems such as poor anti-disturbance ability, high test cost, and influence of surface shape of test accuracy, and achieve the effects of improving accuracy, improving anti-disturbance ability, and reducing test cost

Inactive Publication Date: 2020-11-10
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] In order to solve the technical problems of the traditional large-aperture optical system MTF detection method, the test accuracy is easily affected by the surface shape of the optical element in the large-aperture collimator, the anti-disturbance ability is poor, and the technical problems of high test cost, the present invention provides a large-aperture optical System MTF measuring device and method

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  • Large-aperture optical system MTF measuring device and method

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[0061] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0062] Such as figure 1 As shown, the large-aperture optical system MTF measurement device provided by the present invention includes an active Hartmann wavefront sensor 1, a reference plane mirror 3, a two-dimensional guide rail 4 and a control system.

[0063] The large aperture optical system 2 to be tested is arranged between the active Hartmann wavefront sensor 1 and the reference plane mirror 3 . The reference plane mirror 3 is arranged on the two-dimensional guide rail 4 , and the movement of the two-dimensional guide rail 4 is controlled by the control system 5 .

[0064] The light beam emitted by the active Hartmann wavefront sensor 1 reaches the small-aperture reference plane reflector 3 after passing through the large-aperture optical system 2 to be tested. The light beam is reflected by the reference plane mirror 3 and then passes through the large-aper...

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Abstract

The invention provides a large-aperture optical system MTF measuring device and method in order to solve the technical problems that in a traditional large-aperture optical system MTF detecting mode,the testing precision is easily affected by the surface shape of an optical element in a large-aperture collimator, the disturbance resisting capacity is poor, and the testing cost is high. Accordingto the invention, a small-aperture plane mirror is used as a reference plane mirror, an active Hartmann wavefront sensor is used as wavefront measurement equipment, the small-aperture plane mirror ismoved to each sub-aperture position of a large-aperture optical system, and the active Hartmann wavefront sensor is used to acquire the wave aberration of each sub-aperture. When the full aperture iscompletely covered, sub-aperture wave aberration data are spliced by adopting a sub-aperture splicing algorithm to obtain full aperture wave aberration, and the full aperture wave aberration can be converted into an MTF value of an optical system after numerical calculation. According to the invention, the use of an interferometer and a large-aperture plane mirror is avoided, the anti-disturbancecapability of the whole system is improved, and the test cost is reduced.

Description

technical field [0001] The invention belongs to the field of optical detection, and relates to a large-diameter optical system MTF testing device and method. Background technique [0002] The research and launch of high-resolution optical imaging systems has always been the focus of researchers, and with the continuous improvement of resolution requirements, it is inevitable to require the use of large-aperture optical systems. [0003] The image quality of the large-aperture optical system needs to be evaluated during and after the adjustment process to determine whether it meets the design requirements. MTF (Modulation Transfer Function), as an important index for evaluating the imaging quality of optical systems, is widely used in the detection of optical systems. [0004] There are two ways to detect the MTF of the traditional large-aperture optical system: [0005] (1) Target imaging measurement. This measurement method uses a large-diameter collimator with a compara...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01M11/0207G01M11/0292
Inventor 鄂可伟赵建科周艳王涛王争锋刘锴李晶薛勋李坤
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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