Device and method for generating multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light sources
A vacuum ultraviolet and coherent light source technology, which is applied in optics, nonlinear optics, instruments, etc., can solve the problems of limiting the flexibility of polarization control and the absorption of nonlinear crystals limited by the shortest wavelength, and achieves short pulse width, narrow bandwidth, and easy operation. convenient effect
Active Publication Date: 2022-05-31
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
In recent years, based on KBe 2 BO 3 f 2 The rapid development of nonlinear optical crystals provides a simple and effective solution for realizing high-energy DUV / VUV light sources, but its shortest wavelength is limited by the absorption edge of nonlinear crystals
For this type of nonlinear optical crystal, wavelength tuning can be achieved by adjusting the phase matching angle, but the requirement of phase matching limits the flexibility of polarization control
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A device and method for generating multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light sources. Its main components include: near-infrared femtosecond laser, beam splitter, delay line, beam reduction system, frequency doubling crystal, half-wave plate, quarter-wave plate, focusing lens, air cavity, filter, etc. . In this device, a near-infrared femtosecond laser is split into two beams through a beam splitter, one beam is used as near-infrared pump light, and the other beam is used to generate wavelength-tunable ultraviolet pump light. The near-infrared pump light performs molecular ionization and two-photon resonance excitation in the CO gas cavity, and performs resonant four-wave mixing with the ultraviolet pump light to output narrow-band DUV / VUV coherent radiation. By changing the degree of elliptic polarization of the UV pump light, narrow-band DUV / VUV coherent radiation with arbitrary polarization states can be generated. The invention can realize narrow-band DUV / VUV coherent radiation with multiple wavelengths, narrow line width and flexible and controllable polarization.
Description
Device and method for generating multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light sources technical field The present invention relates to short wavelength coherent light source, particularly a kind of production of multi-wavelength vacuum ultraviolet and deep ultraviolet coherent light source. The production device and method are of great significance for nanolithography, surface analysis, and precise measurement. Background technique Vacuum ultraviolet (Vacuum Ultraviolet, VUV, 100-200nm) and deep ultraviolet (Deep Ultraviolet, DUV, 200‑300nm) coherent light source is an important tool for high-resolution spectroscopy, surface science, photochemistry and other research. currently free Electron lasers, due to their ultra-high brightness and good coherence, have achieved great success in the generation of short-wavelength light sources. However, such large scientific devices are bulky and expensive, which limit their wide application (see C.Pe...
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IPC IPC(8): G02F1/35
CPCG02F1/3536G02F1/3501
Inventor 程亚姚金平万悦芯刘招祥许波陈锦明张方波张志豪
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI