Method for preparing aluminum oxide coating by modulating high-current pulsed arc

A technology of alumina coating and strong current pulse, applied in coating, metal material coating process, vacuum evaporation coating, etc., can solve the problem of poor surface conductivity of target material, aggregation of aluminum arc spot movement, affecting coating quality, etc. The problem is to reduce the generation of large particles, improve the ionization rate, and increase the utilization rate.

Active Publication Date: 2020-12-04
WENZHOU POLYTECHNIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] With the development of technology, the arc source of DC arc ion plating has been continuously improved. For the conventional nitride coating, its large particles have been well controlled, but for the preparation of oxides, the DC power supply in the arc discharge

Method used

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  • Method for preparing aluminum oxide coating by modulating high-current pulsed arc
  • Method for preparing aluminum oxide coating by modulating high-current pulsed arc
  • Method for preparing aluminum oxide coating by modulating high-current pulsed arc

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0066] EXAMPLE 1. Aluminum oxide coating prepared on the tool using pulse arc technology

[0067] Note: This embodiment is deposited on the basal layer as a base layer, and then the aluminum oxide coating is deposited, and then TiN is deposited as a decorative functional layer.

[0068] The coating apparatus used in the present invention is an apparatus for a conventional industrial application: a device for a diameter D = 1 m, a height h = 1m, and is prepared by a coating, and a conventional octahedral structure is used for equipment description. The four-ranks, each column arc has three cathode arc sources.

[0069] See image 3 As shown: The first column is equipped with 3 TI targets, the second column is equipped with 3 Alti (40 / 60) targets, and the third column is equipped with 3 pure metal Al target, and the fourth column is equipped with 3 Alti (50 / 50).

[0070] See Table 1, the main process parameters of the present embodiment are as follows:

[0071] 1. Extract vacuum, h...

Example Embodiment

[0079] Embodiment 2. Composite coating prepared on the tool using pulse arc technology

[0080] Note: This embodiment is used as a base layer as a base layer, and then a composite coating containing an alumina coating is re-deposited, and then the TION is subsequently deposited as a decorative functional layer.

[0081] See image 3 As shown: The first column is equipped with 3 TI targets, the second column is equipped with 3 Alti (50 / 50) targets, and the third column is equipped with 3 pure metal Al target, and the fourth column is equipped with 3 AlCr (30 / 70); In this embodiment, second, 3, and the fourth column source is applied to a pulse arc power source.

[0082] See Table 2, the main process parameters of the present embodiment are as follows:

[0083] 1. Extract vacuum, heating to 450 ° C, and set to 2 turn / min

[0084] 2. Turn the baffle to Ti target forward, extracted into argon 300, hydrogen 300, adjusting the throttle to control the air pressure of 3 Pa, the bias is...

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Abstract

The invention belongs to the technical field of surface coating preparation, and particularly relates to a method for preparing an aluminum oxide coating by modulating a high-current pulsed arc. The method comprises the following steps that a functional layer is formed, wherein the functional layer is a single layer formed by depositing aluminum oxide or a single layer formed by depositing aluminum oxynitride or a multi-layer composite coating formed by alternately depositing nitride and aluminum oxide; the aluminum oxide or aluminum oxynitride is formed by modulating high-current pulse arc discharge deposition; and the modulated high-current pulse arc adopts direct-current base current and low-frequency large-beam pulse current as a discharge power supply to perform arc discharge. Stablearc discharge is achieved through low-base-value current in a pulse arc discharge technology, accumulation poisoning of an oxide layer in the target surface discharge process is avoided through instantaneous maximum peak current, the ionization rate of oxygen is increased, an oxide coating is fully formed, arc spots are made to cover the whole target surface, generation of large particles in the arc discharge process is reduced, the ionization rate of particles is improved, and the high-quality and high-performance aluminum oxide coating is obtained.

Description

technical field [0001] The invention belongs to surface coating preparation technology, in particular to a method for preparing aluminum oxide coating by modulating high-current pulse arc. Background technique [0002] In the process of high-speed and dry cutting, a large amount of cutting heat may be generated between the surface of the machining tool and the workpiece, and its surface temperature can reach above 1000°C. Excessive temperature will lead to the failure of the surface coating of the material (the red hardness of the coating ), and at this stage, the red hardness temperature of the nitride coating on the tool surface only reaches 1000°C, which cannot satisfy the high-speed machining and dry cutting required by the modern machining industry. [0003] Al2O3 coating has high wear resistance and red hardness, and still has good thermal stability above 1000 ° C. At the same time, aluminum oxide coating also has good thermal barrier properties, which is a common ther...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06C23C14/08
CPCC23C14/325C23C14/081C23C14/0676C23C14/0641
Inventor 郎文昌
Owner WENZHOU POLYTECHNIC
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