Device for preparing graphene crystal film through electron beam scanning
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A technology of electron beam scanning and graphene, applied in crystal growth, post-processing equipment, single crystal growth, etc. Pollution of the surrounding environment and other issues, to meet the needs of large-scale batch production, meet the needs of laboratory scientific research work, and reduce the effect of discharge phenomena
Active Publication Date: 2020-12-29
AVIC BEIJING AERONAUTICAL MFG TECH RES INST
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[0003] At present, the preparation of graphene crystal thin films mainly includes chemical vapor deposition method, outer edge growth method, peeling method, etc., and the above methods cannot meet the needs of large-scale batch production.
In recent years, some research institutions at home and abroad have begun to use electron beam irradiation and laser scanning methods to prepare graphene crystal films, but they still cannot meet the needs of large-scale preparation of high-quality graphene crystal films.
Among them, when using electron beam irradiation technology to prepare graphene crystal thin films, although the width and layer number of graphene can be controlled, the beam spot diameter is less than 50nm, and the irradiation time needs 10s to 120s. The production efficiency is too low to adapt to large-scale Batch production requirements; when using laser scanning technology to prepare graphene crystal films, it is usually carried out in an atmospheric environment. During the process of laser scanning carbon polymer films, the carbon powder produced is easy to pollute the surrounding environment, and the quality of graphene crystal films produced Susceptible to gas impurities, making it difficult to significantly improve quality
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Embodiment 1
[0076] see figure 1 , the workbench is an X-Y workbench 5, and an infrared CCD system 22 is installed inside the toner adsorption cover 9, and the infrared CCD system 22 is electrically connected with a display 221 outside the vacuum chamber 4, and the infrared CCD The system 22 and the display 221 are used to observe the preparation state of the graphene crystal thin film, and adjust the graphene preparation work area so that the operator can observe the state of the work area.
[0077] In this embodiment, the detailed working process is as follows:
[0078] Step 1, open the X-Y workbench 5 to the outside of the vacuum chamber 4, lay the insulating plate 6 on the X-Y workbench 5, and then lay the metal substrate 7, connect the metal substrate 7 and the current sensor 10, and cover the metal substrate 7 with carbon polymer Thin film 8;
[0079] Step 2: Open the X-Y workbench 5 with the metal substrate 7 and the carbon polymer film 8 covered thereon into the vacuum chamber 4,...
Embodiment 2
[0094] see Image 6 , the workbench is an X workbench 17, the X workbench 17 is provided with a platform tooling 18, and the two sides of the platform tooling 18 are respectively equipped with a raw material installation rotating shaft 15 and a finished product installation rotating shaft 16;
[0095] The insulating plate 6 is installed on the platform tooling 18, one end of the carbon polymer film 8 is installed on the raw material installation shaft 15, and the other end is close to the metal substrate 7 and rolled by the finished product installation shaft 16. around.
[0096] In this embodiment, the detailed working process is as follows:
[0097] Step 1, open the X workbench 17 to the outside of the vacuum chamber 4, install the platform tooling 18 on the X workbench 17, place the metal substrate 7 on the platform tooling 18, and connect it with the current sensor 10; install the raw material on the rotating shaft 15, the finished product The installation shaft 16 is in...
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Abstract
The invention discloses a device for preparing a graphene crystal film through electron beam scanning. The device comprises a vacuum chamber and an electron gun arranged at the top of the vacuum chamber, a workbench is arranged in the vacuum chamber, an insulating plate is arranged on the workbench, a metal substrate is arranged on the insulating plate, and a carbon polymer film is arranged on themetal substrate; a carbon powder adsorption cover is adopted to cover an area from the outer side of the carbon polymer film to an electron beam output port in the top of the inner side of the vacuumchamber, the carbon powder adsorption cover comprises an inner layer and an outer layer, a plurality of insulating ceramic blocks are arranged between the inner layer and the outer layer, the inner layer is grounded, and the outer layer is electrically connected with a first direct-current power supply, so that a first adsorption electrostatic field is formed between the inner layer and the outerlayer; wherein the first adsorption electrostatic field is used for adsorbing carbon powder generated in the process of preparing the graphene crystal film through electron beam scanning. Carbon powder generated in the machining process can be adsorbed to the maximum extent through the carbon powder adsorption cover, pollution of the carbon powder generated in the machining process to an electronic gun and a vacuum chamber is effectively prevented, and the service life of equipment is prolonged.
Description
technical field [0001] The invention relates to the technical field of preparing graphene crystal thin films, in particular to a device for preparing graphene crystal thin films by electron beam scanning. Background technique [0002] Graphene powder and graphene crystal film are two types of graphene that are currently recognized in the industry. At present, the production equipment and process technology of graphene powder are becoming more and more mature, but the preparation technology of graphene crystal film is still in the laboratory stage. Compared with graphene powder, graphene crystal film has more obvious advantages in application in various industries. In the field of aerospace, wires based on graphene crystal films can replace metal wires, or be prepared directly on polyimide-based composite materials according to the wire layout, which can reduce the structural weight of aircraft and effectively improve the overall performance of the aircraft. Graphene crysta...
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Application Information
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