Polishing equipment and method without subsurface damage

Abstract

The invention discloses polishing equipment without subsurface damage. The polishing equipment comprises a plasma generating device, a magnetic field device, a high-energy charged ion binding cavity and a processing polishing vacuum cavity, wherein high-energy charged ions generated by the plasma generating device are bound and isolated in the high-energy charged ion binding cavity outside a polishing area in the processing polishing vacuum cavity through a magnetic field generated by the magnetic field device, and free radical plasma active groups generated by the plasma generating device enter the polishing area in the processing polishing vacuum cavity to realize polishing and the like. According to the polishing equipment, the number of the high-energy charged ions in a process cavityis effectively reduced, the bombardment sputtering effect of the high-energy ions on the surface of an optical element is greatly reduced, a subsurface damage layer of the optical element can be effectively removed, and the surface quality of the optical element is obviously improved.

Description

technical field [0001] The invention relates to the field of optical processing, and more specifically, to a non-subsurface damage polishing device and method. Background technique [0002] With the development of modern short-wave optics, strong light optics, electron optics and thin film science, the surface quality requirements of the required materials are getting higher and higher. In the high-tech field, the demand for high-quality optical components is also increasing day by day. This situation puts forward higher requirements for the ability to process and manufacture optical components. [0003] Subsurface damage of optical components is the microcracks, fractures, deformations and other defects lurking under the surface of optical components, which will cause light scattering and signal loss, and increase the damage threshold of laser light. For high-performance optical components, such as laser gyro systems and laser mirrors, there are generally strict requiremen...

AI Technical Summary

Problems solved by technology

Represented by non-contact polishing methods such as neutral ion beam polishing and plasma-assisted chemical polishing, these technologies can obtain better surface shape accuracy and surface quality, but in the process of generating plasma, high-energy ions will be generated to continuously bombard the material Surface, resulting in physical sputtering effects, which will generate new subsurface damage to the processed optical components

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