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Method for modifying polyimide surface by laser texturing of circular pit array and injection of metal ions

A technology of metal ion implantation and polyimide, which is applied in the direction of ion implantation plating, laser welding equipment, metal processing equipment, etc., to achieve the effect of improving friction and wear performance, reducing friction coefficient, and increasing bearing capacity

Active Publication Date: 2021-02-19
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, with the advancement of science and technology, how to improve the wear resistance of the polyimide surface and reduce the coefficient of friction still faces difficulties

Method used

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  • Method for modifying polyimide surface by laser texturing of circular pit array and injection of metal ions

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] (1) Ultrasonic cleaning of polyimide in polyionized water for 20 min, repeated 3 times, to remove surface pollutants;

[0021] (2) Put the cleaned polyimide into the laser processing system, and use the "single pulse at the same point multiple times" process to texture the surface of the polyimide polymer with a circular pit array: adjust the scanning speed to 5 mm / s, power 10 W, pulse frequency fixed at 15 kHz, repeated marking times 35 times;

[0022] (3) Put the polyimide with textured surface into the vacuum chamber, and vacuum to 1×10 -4 Pa; the Al target is pre-installed in the vacuum chamber as the ion implantation material;

[0023] (4) Turn on the arc power supply, adjust the current to 20 A, the duty cycle to 56%, and generate a beam current density of 0.24 A / 100 cm 2 s, control the acceleration voltage -15 kV, use Mevva-V.Ru vacuum arc ion source to implant metal Al, the injection time is 250 s, take it out after the cavity is cooled, and obtain the modifie...

Embodiment 2

[0026] (1) Ultrasonic cleaning of polyimide in polyionized water for 20 min, repeated 3 times, to remove surface pollutants;

[0027] (2) Put the cleaned polyimide into the laser processing system, and use the "single pulse at the same point multiple times" process to texture the surface of the polyimide polymer with a circular pit array: adjust the scanning speed to 8 mm / s, power 6 W, pulse frequency fixed at 15 kHz, repeated marking times 50 times;

[0028] (3) Put the polyimide with textured surface into the vacuum chamber, and vacuum to 1×10 -4 Pa; the Al target is pre-installed in the vacuum chamber as the ion implantation material;

[0029] (4) Turn on the arc power supply, adjust the current to 17 A, the duty cycle to 56%, and generate a beam current density of 0.19 A / 100 cm 2 s, control the acceleration voltage -15 kV, use Mevva-V.Ru vacuum arc ion source to implant metal Al, the injection time is 160 s, take it out after the cavity is cooled, and obtain the modified...

Embodiment 3

[0032] (1) Ultrasonic cleaning of polyimide in polyionized water for 20 min, repeated 3 times, to remove surface pollutants;

[0033] (2) Put the cleaned polyimide into the laser processing system, and use the "single pulse at the same point multiple times" process to texture the surface of the polyimide polymer with a circular pit array: adjust the scanning speed to 2 mm / s, power 12 W, pulse frequency fixed at 15 kHz, repeated marking times 30 times;

[0034] (3) Put the polyimide with textured surface into the vacuum chamber, and vacuum to 1×10 -4 Pa; the Al target is pre-installed in the vacuum chamber as the ion implantation material;

[0035] (4) Turn on the arc power supply, adjust the current to 25 A, the duty cycle to 56%, and generate a beam current density of 0.28 A / 100 cm 2 s, control the acceleration voltage -15 kV, use Mevva-V.Ru vacuum arc ion source to implant metal Al, the injection time is 80 s, take it out after the cavity is cooled, and obtain the modified...

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Abstract

The invention discloses a method for modifying a polyimide surface by laser texturing of a circular pit array and injection of metal ions The method comprises the following steps: carrying out circular pit array texturing treatment on the polyimide surface by using a laser processing system and a single-pulse same-point multiple-interval process, and injecting Al metal ions into the textured polyimide surface by adopting a Mevva-5.Ru vacuum arc ion source to obtain modified polyimide. The friction coefficient of the modified polyimide is reduced from 0.80 to about 0.20, and the modified polyimide has low friction performance, can be used in the fields of aviation, spaceflight, microelectronics, nanometer, liquid crystal, separation films, laser and the like, and can also be used as a new technology for surface treatment of bridges and building sliding plates to improve the surface wear resistance and lubricating performance.

Description

technical field [0001] The invention relates to a method for modifying polyimide surface friction resistance, in particular to a method for implanting metal ions into a modified polyimide surface with a laser textured circular pit array to improve the tribological properties of polyimide . Background technique [0002] Polyimide refers to a class of polymers containing imide rings (-CO-NH-CO-) on the main chain, and polymers containing phthalimide structures are the most important. Polyimide is a special engineering material with excellent high temperature resistance, chemical stability, excellent mechanical properties and electrical properties. It is often used in high-tech and high value-added fields, such as aviation, aerospace, microelectronics, nano, Liquid crystal, separation film, laser and other fields. [0003] At present, friction and wear are one of the factors restricting the high reliability and long service life of polyimide materials in high-tech and high va...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/48C23C14/02B23K26/352C08J7/12C08L79/08
CPCB23K26/355C08J7/12C08J2379/08C23C14/028C23C14/48
Inventor 张俊彦贾倩张斌王宏刚高凯雄
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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