Manufacturing and packaging method of split type differential quartz vibrating beam accelerometer

Abstract

The invention relates to a manufacturing and packaging method of a split type differential quartz vibrating beam accelerometer and relates to the technical field of micro-inertial sensing in a micro-electro-mechanical system. A hollow shell seat, an upper cover group hermetically arranged at the top of the shell seat, a bottom cover hermetically arranged at the bottom of the shell seat and a sensing module arranged in the shell seat are arranged. The sensing module is arranged in a manner that two sensing head components which are machined respectively are symmetrically distributed and connected with the inner shell in a sealed manner, so that a differential working mode of the quartz vibrating beam accelerometer is realized; compared with an existing integrally-machined sensing head component, the sensing module enables the machining difficulty to be lowered, and mass production is better facilitated; the vacuum working environment of the sensing module can effectively isolate the influence of external thermal stress and reduce the thermal elastic loss; and air damping and electrode sputtering can be reduced, the quality factor of the sensing chip is improved, and the precision ofthe quartz vibrating beam accelerometer is improved.

Description

technical field [0001] The invention relates to the technical field of micro-inertial sensing in micro-electro-mechanical systems, in particular to a manufacturing and packaging method of a split-type differential quartz vibration beam accelerometer. Background technique [0002] Quartz vibrating beam accelerometer is a sensor that uses the resonant measurement principle to convert the measured acceleration into the natural frequency change of the quartz vibrating beam. It has the advantages of large range, high precision, small size, low power consumption, and quasi-digital output. , can be widely used in tactical missile attitude control, inertial navigation, earth resource exploration and other fields, and has important military and civilian values. [0003] At present, in order to reduce common-mode noise and improve accuracy, quartz beam accelerometers generally adopt a differential structure; currently, an integrated differential quartz beam accelerometer is often used...

AI Technical Summary

Problems solved by technology

[0003] At present, in order to reduce common-mode noise and improve accuracy, quartz beam accelerometers generally adopt a differential structure; currently, an integrated differential quartz beam accelerometer is often used, and the integrated differential structure uses MEMS technology to combine two differential structures. The sensor module is integrally processed and formed; the one-piece differential structure requires high processing consistency of the two differential sensitive vibration beams, which is difficult to achieve with the current wet etching process. Therefore, it is difficult for the one-piece differential structure to meet high-precision quartz oscillators. Quality Control Requirements for Mass Production of Beam Accelerometers

Images