Infrared band-pass filtering structure and infrared band-pass filter using same

Abstract

The invention provides an infrared band-pass filtering structure which is formed by alternately stacking a plurality of silicon aluminum hydride layers and a plurality of lower refractive index layers, the lower refractive index layers are oxide, the infrared band-pass filtering structure is provided with a passband which is at least partially overlapped within the wavelength range of 800 nm to 1600 nm, the passband is provided with a central wavelength, and the incident angle of the central wavelength is changed from 0 degree to 30 degrees, the magnitude deviation amplitude of the central wavelength is smaller than 11 nm; the infrared band-pass filter is characterized in that the infrared band-pass filtering structure is formed on a first side surface of a substrate, and an anti-reflection layer is formed on a second side surface, opposite to the first side surface, of the substrate; therefore, the sputtering efficiency can be improved, the manufacturing cost can be greatly reduced, the warping amount of the film layer can be reduced, and the problem that corners are prone to breakage during post-processing cutting is solved.

Description

technical field [0001] The invention relates to the technical field of an infrared band-pass filter structure and the structure of the filter, in particular to a method that can improve the sputtering efficiency to greatly reduce the production cost, and can reduce the warpage of the film layer to solve the problem of post-production cutting. The infrared band-pass filter structure for the problem of easy chipping and the infrared band-pass filter using the structure. Background technique [0002] General optical filters can be divided into band-pass filters, short-wave cut-off filters, and long-wave cut-off filters according to their spectral characteristics. Band-pass filter refers to the passage of light in a specific wavelength band, and the cut-off of light outside the pass band. It is divided into narrow band and broadband according to bandwidth. It is usually distinguished by the value of bandwidth to center wavelength. Less than 5% is narrow band, and greater than 5%...

AI Technical Summary

Problems solved by technology

[0009] The main purpose of the present invention is to solve many problems such as the low sputtering efficiency of the well-known infrared bandpass filter, which leads to high production cost, and the warpage of the film layer leads to easy chipping during post-production cutting.

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