Flexible capacitive pressure sensor and preparation method thereof

A pressure sensor and flexible capacitor technology, applied in the field of flexible sensors, can solve the problems of low relative value and reduce the flexibility requirement of the electrode layer, and achieve the effect of improving sensitivity, improving accuracy and long-term effect, and high sensitivity

Pending Publication Date: 2021-03-12
YANSHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this patent has the following limitations: by filling the electrode layer with nickel-plated carbon fiber rigid material, although the conductivity is enhanced

Method used

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  • Flexible capacitive pressure sensor and preparation method thereof
  • Flexible capacitive pressure sensor and preparation method thereof
  • Flexible capacitive pressure sensor and preparation method thereof

Examples

Experimental program
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Example Embodiment

[0037] Example 1

[0038] This embodiment provides a flexible capacitive pressure sensor, such as figure 1 As shown, it includes: the first electrode plate 11, the second electrode plate 12, the flexible dielectric layer 31, and the electrostatic film, and the first electrode plate 11 is disposed opposite the second electrode plate 12, and the first electrode plate 11 and the second The surface of the conductive film of the electrode plate 12 is attached to an electrostatic film, i.e., the conductive film surface of the first electrode plate 11 is attached to the first electrostatic film 21, and the surface of the conductive film of the second electrode plate 12 is attached to the second electrostatic film 22, The flexible dielectric layer 31 is disposed between the first electrode plate 11 and the second electrode plate 12. Among them, the flexible dielectric layer 31 is a composite material obtained by combining modified titanium dioxide with a polyurethane sponge. The flexible...

Example Embodiment

[0044] Example 2

[0045] This embodiment provides a flexible capacitive pressure sensor, which is consistent with Embodiment 1, and the preparation method thereof comprises:

[0046] (1) First cut the polyurethane sponge to (2 × 2 × 0.1 cm) size, washed with ultrapure water, and dried at 50 ° C for 10 h.

[0047] (2) Then 10 ml of 1 mg / ml of titanium dioxide aqueous solution was placed in a beaker, and stirred well at 30 ° C. Then 0.1 g of APTES was added, and ultrasonic 1 h was performed at room temperature to form a second solution.

[0048] (3) Removal of the polyurethane sponge into the second solution for 3 minutes, i.e., the mass ratio of the titanium dioxide nanoparticles and the polyurethane sponge is 2: 3, and the APTES is connected to the polyurethane and titanium dioxide, so that the two are closely combined, and the structure is not destroyed. The corresponding dielectric layer M2 is obtained.

[0049] (4) After washing the flexible electrode ITO / PET, after the ul...

Example Embodiment

[0050] Example 3

[0051] This embodiment provides a flexible capacitive pressure sensor, which is consistent with Embodiment 1, and the preparation method thereof comprises:

[0052] (1) First cut the polyurethane sponge to (2 × 2 × 0.1 cm) size, washed with ultrapure water, and dried at 50 ° C for 10 h.

[0053] (2) Then 1 mg / ml of titanium dioxide aqueous solution was 15 ml to be placed in a beaker, and the solvent was evaporated to 10 mL by water bath, which was a titanium dioxide solution concentration of 1.5 mg / ml, and stirred well at 30 ° C. Then 0.1 g of APTES is added, and ultrasonic 1 h is performed at room temperature to form a third solution.

[0054] (3) Removal of the polyurethane sponge into the third solution for 3 minutes, that is, the mass ratio of the titanium dioxide nanoparticles and the polyurethane sponge is 1: 1, and the APTES is connected to the polyurethane and titanium dioxide, so that the two are closely combined, and the structure is not destroyed....

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Abstract

The invention provides a flexible capacitive pressure sensor and a preparation method thereof, and belongs to the field of flexible sensors. The sensor comprises a first electrode plate, a second electrode plate, a flexible dielectric layer and electrostatic films, the first electrode plate and the second electrode plate are oppositely arranged, the electrostatic films are attached to the surfaceof a conductive film of the first electrode plate and the surface of a conductive film of the second electrode plate, and the flexible dielectric layer is arranged between the first electrode plate and the second electrode plate; and the flexible dielectric layer is a composite material obtained by combining modified titanium dioxide and polyurethane sponge. According to the invention, polyurethane combined with modified titanium dioxide is used as the flexible dielectric layer and is bonded with the flexible electrode in a pressurized manner, so that the preparation of the flexible capacitivepressure sensor with high sensitivity is realized, the sensor has extremely low detection limit, and the multifunctional measurement of the sensor is realized.

Description

technical field [0001] The invention relates to the field of flexible sensors, in particular to a flexible capacitive pressure sensor and a preparation method thereof. Background technique [0002] High technologies such as wearable exoskeletons, surveillance and reconnaissance sensors, individual radio stations, and intelligent robots are crucial to the development of modern industries, and flexible sensors are a key device that restricts the development of these technologies. The flexible sensor has the characteristics of controllable size, extremely light weight, and strong environmental adaptability. It senses the environment through changes in external pressure, and then generates a positive and correct response to the target to be measured. Therefore, it can be used for brain wave control and key parts of motorized equipment. Fault diagnosis, wearable exoskeleton, intelligent combat uniform and intelligent robot and other fields. At the same time, there are also exten...

Claims

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Application Information

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IPC IPC(8): G01L1/14
CPCG01L1/148
Inventor 徐朝鹏赵帅吕晓荣周震宇孙正灿边飞
Owner YANSHAN UNIV
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