Semiconductor structure and forming method thereof
A semiconductor, multi-layer structure technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problem that the accuracy of pattern transfer needs to be improved
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[0031] As mentioned in the background art, in the process of forming a semiconductor structure in the prior art, the accuracy of pattern transfer needs to be improved. The following will combine Figure 1 to Figure 4 Be explained, Figure 1 to Figure 4 It is a structural schematic diagram of each step in the formation process of a semiconductor structure.
[0032] Please refer to figure 1 and figure 2 , figure 2 Yes figure 1 A schematic cross-sectional view along line A-A, providing a layer to be etched 100; forming an initial mask layer 101 on the layer to be etched 100; forming an exposed portion of the initial mask layer 101 on the initial mask layer 101 Graphical structure 102 of .
[0033] Please refer to image 3 and Figure 4 , Figure 4 Yes image 3 A schematic cross-sectional view along line A-A, using the patterned structure 102 as a mask, ion doping treatment is performed on the initial mask layer 101 to form a mask layer (not shown), and the mask layer ...
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