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Purification device and method for germanium tetrafluoride

A germanium tetrafluoride and condensation device technology, applied in the field of chemical equipment, can solve the problems of many germanium tetrafluoride impurities, difficult to purify due to special properties, etc., and achieve the effects of improving purity, stabilizing temperature deviation and expanding condensation area

Active Publication Date: 2022-02-15
YUNNAN LINCANG XINYUAN GERMANIUM IND +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of the present invention is to provide a safe and reliable device for purifying germanium tetrafluoride to solve the problem that germanium tetrafluoride produced in industry has many impurities and has special properties and is difficult to purify

Method used

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  • Purification device and method for germanium tetrafluoride
  • Purification device and method for germanium tetrafluoride
  • Purification device and method for germanium tetrafluoride

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Such as Figure 1-4 As shown, a purification device for germanium tetrafluoride includes a gas supply device, a rectification tower 1, a condensation device 5, a transfer device 8 and a storage device, and the storage device is a waste gas collection bottle 9 and a germanium tetrafluoride collection bottle 10, and the pipeline connecting the collection bottle is provided with a valve 11, the gas supply device includes a flow meter 2, a 4A molecular sieve 3 and the valve are connected to the bottom of the rectification tower 1 through pipelines in turn, and the condensing device 5 is a refrigeration device, which can be an existing A variety of refrigerators.

[0038] The rectification column 1 includes a shell 1-1 and several layers of tower frames 1-2. A rectangular tower frame 1-4 is arranged in the tower frame. The tower frame and the tower frame are opened at the top and bottom. Angled trays 1-3, each layer of tower frames 1-2 are connected to the inlet / outlet pipe...

Embodiment 2

[0043] Purification device is connected according to the order in embodiment 1, wherein the tower frame in the rectifying tower is 6 layers, externally connects three condensing devices, the long 50cm wide 40cm high 30cm of tower frame body, used conventional instrument all can be purchased from the market, The model of the condensing unit may be K-5AHGT. The specific purification method using this structure is as follows:

[0044] (1) Open all valves except the gas supply device, turn on the air pump, evacuate the entire purification device, and then close all valves;

[0045] (2) Turn on the condensing device connected to the rectifying tower and the first condensing pipe. The condensing device feeds the condensing agent to the rectifying tower. The temperature is -10°C; the temperature of the first condensing pipe is -50°C, then open the valve of the gas supply device, the front and rear valves of the first condensing pipe, and the front valve of the exhaust gas collection...

Embodiment 3

[0051] Purification device is connected according to the order in embodiment 1, wherein the tower frame in the rectifying tower is 6 layers, externally connects three condensing devices, the long 50cm wide 40cm high 30cm of tower frame body, used conventional instrument all can be purchased from the market, The model of the condensing unit may be K-5AHGT. The specific purification method using this structure is as follows:

[0052] (1) Open all valves except the gas supply device, turn on the air pump, evacuate the entire purification device, and then close all valves;

[0053] (2) Turn on the condensing device connected to the rectifying tower and the first condensing pipe, the condensing agent input from the condensing device to the rectifying tower, the temperature of the condensing agent input at the top of the tower frame is -40°C, the middle temperature is -35°C, the bottom Temperature -5°C; the temperature of the first condensing pipe is -50°C, then open the valve of t...

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Abstract

The invention belongs to the field of chemical equipment, and specifically discloses a germanium tetrafluoride purification device and method, including a gas supply device, a rectification tower, a condensation device, a transfer device and a storage device, and the rectification tower includes a shell and several layers of tower frames , the top and bottom of the tower frame are open, and several trays with a certain inclination angle are arranged in parallel in the frame. Each layer of the tower frame is connected to a condensing device pipe through a pipe, and the transfer device is a vacuum pump or an air pump, and is connected to the storage device through a pipe. The rectification tower is connected to the transfer device through three branch pipelines. Condensation pipes and valves are respectively installed on the pipes. The condensation pipe is connected with a condensation device through the pipes. This device ensures the vacuum state in the rectification tower and greatly improves the concentration of germanium tetrafluoride. The purity of germanium tetrafluoride can be improved to high purity, and the device makes the rectification process simple, practical, accurate and targeted, making germanium tetrafluoride higher in purity and better in purification effect.

Description

technical field [0001] The invention belongs to the field of chemical equipment, and in particular relates to a germanium tetrafluoride purification device and method. Background technique [0002] Germanium tetrafluoride is mainly used to produce stable germanium 72 and germanium 76 isotopes, which are used in doping and ion implantation in the semiconductor industry. The isotopes of electronic-grade germanium tetrafluoride are used as chemical reagents for etching and performance optimization of 10nm-level DRAM chips, and as high-energy physical isotope tracer atoms. [0003] Germanium tetrafluoride (GeF4) is a germanium fluoride with special physical and chemical properties: it is a colorless gas at normal temperature and pressure, it is stable to heat and does not decompose at 1000°C, its melting point is -15°C, and its boiling point is cooled under normal pressure. Immediately solidifies, sublimes at -36.5°C. [0004] Due to the special physical and chemical propertie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D3/14B01D3/32B01D5/00C01G17/04
CPCB01D3/14B01D3/324B01D5/006B01D5/0003C01G17/04
Inventor 尹国文罗中旭普世坤朱知国谢天敏张东晟刘文君李娇吴王昌李正美刘得伟李长林
Owner YUNNAN LINCANG XINYUAN GERMANIUM IND
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