Preparation method of super-hydrophobic and super-oleophobic surface with micro-nano composite structure

A super-hydrophobic, super-oleophobic, micro-nano composite structure technology, applied in the direction of micro-structure technology, micro-structure devices, manufacturing micro-structure devices, etc., can solve the problem of hindering Cassie state stability, difficult micro-column sidewall smoothness, and difficult uniform gel formation Uniform film layer and other issues

Pending Publication Date: 2021-05-04
NANJING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Traditional nanostructure composite methods include spraying, self-assembly, phase separation, etc. Among them, it is difficult to uniformly form a uniform film layer on the surface with a micro-column structure. will hinder the stability of the Cassie state

Method used

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  • Preparation method of super-hydrophobic and super-oleophobic surface with micro-nano composite structure
  • Preparation method of super-hydrophobic and super-oleophobic surface with micro-nano composite structure
  • Preparation method of super-hydrophobic and super-oleophobic surface with micro-nano composite structure

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Embodiment Construction

[0032] Such as figure 1 As shown, this embodiment provides a method for preparing a super-hydrophobic and super-oleophobic surface with a micro-nano composite structure. The specific preparation steps are as follows:

[0033] 1. Preparation of hanging micron square pillars: use ordinary silicon wafer 2 (n or p type, no requirements for resistivity, crystal orientation, etc.) to spin-coat photoresist 1 at a rate of 4000r / s, time 40s, film thickness 1.5μm. Take a square photolithography mask 3 with a line width of 50 μm and a period of 100 μm and perform photolithography to obtain a square column of photoresist with a line width of 50 μm and a period of 100 μm. Use photoresist as a mask for deep silicon etching, and the etching gas is SF 6 , the shielding gas is C 4 f 8 , with a depth of 10 μm, an array of overhanging micron square pillars was obtained.

[0034] 2. Anti-sticking at the bottom of the side wall of the micron square column: first use the ICP-RIE (ULVAC, CE-300I...

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Abstract

The invention discloses a preparation method of a super-hydrophobic and super-oleophobic surface with a micro-nano composite structure. The method comprises the following steps: firstly, preparing a suspended micron column array on a silicon surface by utilizing photoetching and deep silicon etching processes in a micro-nano processing technology, then depositing nano-silver particles at the tops of micron columns through a silver mirror reaction, and carrying out O2 plasma etching treatment to obtain a nano-composite structure; and finally, the obtained micro-nano composite structure being subjected to low surface energy modification through perfluoroalkyl chlorosilane, so that the super-hydrophobic and super-oleophobic functional surface is obtained. The micro-nano composite structure prepared by the method disclosed by the invention is adjustable in micron/nano structure shape, height and density, has the advantages of simplicity in operation, easiness in implementation, low cost and the like, can obtain very good mechanical properties, and has wide application prospects in the aspects of antifouling, self-cleaning, water-oil separation and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-nano processing, and in particular relates to a method for preparing a super-hydrophobic and super-oleophobic micro-nano composite structure. Background technique [0002] As a special wettability state, superhydrophobic and superoleophobic surfaces have attracted extensive attention due to their great application potential in anticorrosion, self-cleaning, water-oil separation, and drag reduction. [0003] At present, there are many studies on the preparation of superhydrophobic. The main preparation methods are mostly chemical modification of low surface energy and construction of micro / nano high-roughness structures based on Wenzel or Cassie models. The Cassie model is due to the existence of the air interface in its structure. It is easier to obtain a stable super-lyophobic effect. However, since the surface tension of oil is smaller than that of water, it is difficult to obtain superamphiphobic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B82Y40/00
CPCB81C1/00492B81C1/00547B81C2201/0102B82Y40/00
Inventor 何宇婷葛海雄李旸
Owner NANJING UNIV
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