An electronic gas tail gas intelligent recovery device and method

Abstract

The invention relates to the technical field of electronic gas tail gas recovery technology, in particular to an electronic gas tail gas intelligent recovery device and method. The present invention includes a substrate and a control console, one end of the top of the substrate is provided with a console, and also includes: a first processing mechanism, a detection mechanism, a second processing mechanism, a third processing mechanism, a gas dehumidification mechanism and an electronic gas collection tank, and the top of the substrate The other end of the substrate is provided with a first processing mechanism, the top of the substrate is located on one side of the control console, and a second processing mechanism and a third processing mechanism are respectively provided. An electron gas collection tank is installed on the side of the first processing mechanism, and the first processing mechanism includes a first processing box. The invention has the advantages of compact structure, continuous operation, convenient device movement, cost saving and high recycling efficiency.

Description

Technical field [0001] The present invention relates to the field of electronic gas exhaust gas recovery techniques, and is specifically an electronic gas exhaust gas intelligent recovery apparatus and method. Background technique [0002] Electronic gas is an integrated circuit, optical electron, microelectronics, especially large-scale integrated circuits, liquid crystal display devices, semiconductor light emitting devices, and semiconductor material manufacturing process, which are called "blood" of the electronics industry. And "food", its purity and cleanliness directly affect the quality, integration, specific technical indicators and yields of optical electronics, microelectronic components, and fundamentally restrictive accuracy and accuracy of circuitry and devices, electronic The gas is used as a cleaning agent or an etchant, and the utilization is only 30-70%, so the electronic gas exhaust gas contains a large amount of unused electronic gas and (C-H) N polymers gener...

AI Technical Summary

Problems solved by technology

[0002] Electronic gas is an indispensable basic supporting raw material in the development of integrated circuits, optoelectronics, microelectronics, especially VLSI, liquid crystal display devices, semiconductor light-emitting devices and semiconductor materials. It is called the "blood" of the electronics industry And "food", its purity and cleanliness directly affect the quality, integration, specific technical indicators and yield of optoelectronics and microelectronic components, and fundamentally restrict the precision and accuracy of circuits and devices. Whether the gas is used as a cleaning agent or an etchant, the utilization rate is only 30-70%, so the electron gas tail gas contains a large amount of unused electron gas and the (C-H)n polymer generated during the cleaning and etching process, and most of the electron gas is Greenhouse gas is the largest source of greenhouse gas emissions in the semiconductor industry: electronic gas tail gas emissions not only cause waste of electronic gases but also affect environmental protection

[0003] Existing electronic gas tail gas recovery devices are generally directly equipped with multiple spray towers to remove impurities in the gas through continuous spraying of the gas, resulting in numerous operating procedures, high equipment costs, cumbersome operations, and low recovery efficiency. Moreover, it is easy to cause gas leakage during multiple operating procedures, which affects the recovery effect of gas. Therefore, we propose an electronic gas tail gas intelligent recovery device and method

Images