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Preparation method of nickel-platinum alloy with high purity and low gas content

A nickel-platinum alloy, gas content technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, to achieve the effect of ensuring purity, improving material purity, and reducing precious metal loss

Active Publication Date: 2021-05-28
GRIKIN ADVANCED MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In fact, Fe, Co, Cu, Ti, Sn metal impurities and gas impurities C, N, H, and Cl other than O will also have a greater impact on the performance of nickel-platinum sputtered films. There is no research in this area, and there is still a lot of room for improvement in the purity and gas content of nickel-platinum alloys prepared by patents

Method used

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  • Preparation method of nickel-platinum alloy with high purity and low gas content
  • Preparation method of nickel-platinum alloy with high purity and low gas content

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preparation example Construction

[0030] according to figure 1 The process flow shown carries out the preparation of nickel-platinum alloy.

[0031] Firstly, the required raw materials are platinum powder and high-purity electrolytic nickel, wherein the purity of platinum powder is ≥99.99%, and the purity of nickel is ≥99.9995%. Do pretreatment on the raw material platinum powder first, put the platinum powder into a special mold, increase the pressure by 50-80MPa, and then raise the temperature at a heating rate of 50-100°C / min. After the temperature reaches 600-800°C, start heat preservation and pressure holding , and the holding time is 45-60 minutes to obtain high-purity platinum blocks.

[0032] Secondly, high-purity electrolytic nickel is put into the crucible for smelting. In this process, in order to ensure the thermal stability of the crucible and avoid impurities caused by cracking or peeling off at high temperature, and in order not to interact with the smelted metal, it is necessary to control the...

Embodiment 1

[0037] 1) Weighing the ingredients, taking 0.6 kg of platinum powder with a purity of ≥99.99% and 11.4 kg of high-purity electrolytic nickel with a purity of ≥99.9995%. Put the platinum powder into a clean special mold, then apply a pressure of 50MPa, and then start to heat up at a rate of 50°C / min until the temperature reaches 700°C, keep the pressure and temperature for 60min, then remove the pressure, and take out the high-purity Platinum block.

[0038] 2) High-purity nickel smelting, first put high-purity nickel into a high-purity zirconia crucible, and vacuumize to 10 -3 Pa, slowly heat the high-purity nickel in the crucible at a rate of 10°C / min to 1460°C, keep it warm for 20 minutes, complete the smelting of high-purity nickel, and then cool down to below 600°C for solidification and degassing for 30 minutes; obtain high-purity nickel solidified body;

[0039] 3) Nickel-platinum alloy smelting: Add the high-purity platinum block obtained in step 1) to the high-purity ...

Embodiment 2

[0043] 1) The ingredients are weighed. First, 1.8 kg of platinum powder with a purity of ≥99.99% is weighed, and then 10.2 kg of high-purity electrolytic nickel with a purity of ≥99.9995% is weighed. Put the platinum powder into a clean special mold, then apply a pressure of 70MPa, and then start to heat up at a rate of 80°C / min until the temperature reaches 800°C, keep the pressure and temperature for 55min, then remove the pressure, and take out the high-purity Platinum block.

[0044] 2) High-purity nickel smelting, first put high-purity nickel into a high-purity zirconia crucible, and vacuumize to 10 -3 Pa, slowly heat the high-purity nickel in the crucible at a rate of 15°C / min to 1500°C and keep it warm for 15 minutes to complete the smelting of high-purity nickel, then cool down to below 600°C for solidification and degassing for 60 minutes to obtain a high-purity nickel solidified body;

[0045] 3) Nickel-platinum alloy smelting: Add the high-purity platinum block obt...

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Abstract

The invention discloses a preparation method of a nickel-platinum alloy with high purity and low gas content, and belongs to the technical field of high-purity nickel alloys. According to the method, platinum powder with the purity larger than or equal to 99.99% and high-purity nickel with the purity larger than or equal to 99.9995% are adopted for preparing the nickel-platinum alloy, the platinum powder is pressed into a high-purity platinum block at high temperature and high pressure, the high-purity nickel is subjected to first-time smelting and solidification degassing, and then the high-purity platinum block is added into the high-purity nickel to be subjected to second-time smelting to obtain the nickel-platinum alloy. The nickel-platinum alloy obtained through the method is uniform in component distribution, high in purity and low in gas content. The nickel-platinum alloy with high purity and low gas content, which is prepared by the method, can meet the performance requirements of large-size and high-purity nickel-platinum alloy target materials for high-end micro-electronics.

Description

technical field [0001] The invention belongs to the technical field of high-purity nickel alloys, in particular to a method for preparing high-purity nickel-platinum alloys with low gas content. Background technique [0002] Nickel-platinum alloy targets play an important role in the manufacture of integrated circuits. With the development of semiconductor manufacturing process, the improvement of chip integration and the increase of wafer size, regardless of material purity, microstructure or macro size, higher and higher requirements are put forward for the performance of the target. Especially for large-sized targets, such as 12-inch nickel-platinum alloy targets, the alloy composition is required to be uniform, the composition deviation should be controlled within ±0.5at%, and the purity should be at least 99.995%, or even higher. The impurity composition in nickel-platinum alloy is divided into metal impurity elements and gas elements. If the content of metal impurity...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C1/02B22F3/14C22B9/04C22C19/03C23C14/35
CPCC22C1/023B22F3/14C22B9/04C22C19/03C23C14/3407C23C14/35
Inventor 张巧霞李勇军罗俊锋徐国进张博厚刘丹庞欣熊晓东滕海涛
Owner GRIKIN ADVANCED MATERIALS