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A simple method for preparing multi-band near-field enhanced composite nanoantennas

A nano-antenna and near-field enhancement technology, which is applied in the direction of vacuum evaporation plating, coating, and radiation element structure, can solve the problems of processing samples, large energy loss of beams, etc., and achieves expanded material range and strong controllability , to avoid the effect of instrument control and energy loss

Active Publication Date: 2022-04-22
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

These processing methods all need the help of external conditions, such as changing the wavelength to use optical parametric amplifier (OPA) or β-phase barium metaborate (BBO) crystal, and the energy loss of the beam obtained is relatively large, which requires a strong original beam supply; and changing The processing environment may have an impact on the processed sample itself

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  • A simple method for preparing multi-band near-field enhanced composite nanoantennas
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  • A simple method for preparing multi-band near-field enhanced composite nanoantennas

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] A simple method for preparing a multi-band near-field enhanced composite nano-antenna, the specific processing schematic diagram is as follows figure 1 Shown:

[0026] Step 1: Prepare a single crystal silicon sample 1 of 10mm*10mm*1mm, ultrasonically clean the silicon substrate with anhydrous ethanol, and plate a layer of metal Cr with a thickness of 5nm on its surface as an adhesion layer by vacuum magnetron sputtering. The target material 3 is then bombarded with a 50nm-thick Au film 2, where the metal film can be any metal that can excite surface plasmons after interacting with the femtosecond laser, preferably Au or Ag.

[0027] Step 2: Adjust the optical path of femtosecond laser processing so that the laser is obliquely incident on the single-point processing pre-order structure

[0028] (1) Adjust the last reflector that the femtosecond ...

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Abstract

The invention relates to a simple method for preparing a multi-band near-field enhanced composite nano-antenna, which belongs to the technical field of laser processing applications. The invention performs single-point processing by obliquely incident focused femtosecond laser, regulates subsequent pulse dislocation processing and adjusts the offset orientation, utilizes the randomness of the included angle between the edge of the preorder structure and the femtosecond laser, and can pass simple Control the femtosecond laser to manufacture the micro-nano grating structure and change its period, and then use the objective lens to focus and process to obtain nano-jet particles, and prepare a composite nano-antenna that can perform near-field enhancement in multiple bands. The present invention solves the single limitation of the near-field enhancement band of the current nano-antenna, and the method of preparing the micro-nano grating and changing its period by using a femtosecond laser oblique incident dislocation single-point processing is simple and easy, and avoids the liquid environment or other processing environments causing damage to the sample. It can be widely used in optical communication, sensing, nano-optoelectronic devices and other fields.

Description

technical field [0001] The invention relates to a simple method for preparing a multi-band near-field enhanced composite nano-antenna, which belongs to the technical field of laser processing applications. Background technique [0002] Optical nanoantennas can localize, regulate and enhance far-field optical radiation in the nanoscale band. The formation of such local "hot spots" can significantly improve the performance of optoelectronic devices, which has attracted extensive research by scholars in the field of nanophotonics. As the simplest nano-antenna, metal nanoparticles can collect and confine electromagnetic energy by generating surface plasmons after receiving incident electromagnetic waves, but their enhancement effect on far-field electromagnetic waves is very limited. Therefore, some scholars have proposed to combine the micro-nano grating structure with light diffraction and unique polarization characteristics with metal nanoparticles to make composite nano-ante...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q1/38C23C14/16C23C14/35C23C14/58
CPCH01Q1/38C23C14/35C23C14/165C23C14/5873
Inventor 姜澜王飞飞孙靖雅
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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