Inversion hybrid adaptive compensation interference detection method and device and computer equipment
A self-adaptive compensation and interference detection technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of unsatisfactory aberration compensation amplitude, limited light field modulation principle, low light energy utilization rate, etc., to achieve Flexible adaptation to grinding, rich flexibility, high spatial frequency effects
Active Publication Date: 2021-06-18
NAT UNIV OF DEFENSE TECH
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However, the spatial light modulator is limited by its light field modulation principle of electrically controlled stress birefringence. Even if only 8 columns of pixels per wavelength are required to load the fringe pattern representing the primary spherical aberration on the spatial light modulator, it is only It can produce a primary spherical aberration of about 15 microns, which cannot meet the requirements of aberration compensation amplitude for large errors in typical surface shapes
In addition, the spatial light modulator works in the diffraction mode, and its light energy diffraction efficiency is generally about 34%, and the light energy utilization rate is low.
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[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the spirit of the disclosure of the present invention will be clearly described below with the accompanying drawings and detailed descriptions. Any person skilled in the art will understand the embodiments of the present invention. , when it can be changed and modified by the technology taught in the content of the present invention, it does not depart from the spirit and scope of the content of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention, but not to limit the present invention.
[0042] refer to figure 1 , an embodiment of the present invention provides an anti-diffraction hybrid adaptive compensation interference detection device, including a wavefront interferometer 1, a polarization beam splitter 2, a beam collimation system 3, a quarter-wave plate 4, a beam redu...
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The invention belongs to the technical field of optical surface shape detection, and particularly provides an inversion hybrid adaptive compensation interference detection method and device and computer equipment. The inversion hybrid adaptive compensation interference detection device is built, firstly, the position of a spatial light modulator in the inversion hybrid adaptive compensation interference detection device is vacant, only a deformable mirror is reserved, an aberration controller is used for driving the deformable mirror to generate low-order aberration compensation, and low-order aberration with a large amplitude ratio is compensated; and then, the deformable mirror keeps the current state fixed, a spatial light modulator is inserted between a spectroscope and the deformable mirror, the aberration controller is used for driving the spatial light modulator to generate high-order aberration compensation, high-order aberration with small amplitude is compensated, the defect that the performance of a single self-adaptive optical element is poor is overcome through the method of cascading the self-adaptive optical element, the performance of the self-adaptive compensation interference detection method is improved, and the method has the advantage of being more flexibly suitable for rough polishing large surface interference detection in the grinding and polishing transition stage.
Description
technical field [0001] The invention belongs to the technical field of optical precision measurement, and in particular relates to a backdiffraction hybrid self-adaptive compensation interference detection method, device and computer equipment. Background technique [0002] The surface error (deviation between the actual shape of the machined surface and the theoretical shape) of ultra-precision optical surface shape can reach the nanometer level. To meet this requirement, deterministic processing methods are required. By detecting the surface shape error distribution before processing, the polishing tool is guided to realize the quantitative correction of the high point of error, thereby improving the surface shape accuracy. As the premise of ultra-precision optical surface shape manufacturing, whether surface shape detection technology can guarantee the high-efficiency manufacturing of optical surface shape will support my country to seize the commanding heights of future ...
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Login to View More IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 薛帅戴一帆石峰
Owner NAT UNIV OF DEFENSE TECH