Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Crack flexible strain sensor based on graphene-gold composite film and preparation method

A technology of strain sensor and composite thin film, applied in the direction of electric/magnetic solid deformation measurement, electromagnetic measurement device, etc., can solve the problems of difficult to balance sensitivity and range, wide linear sensing range, difficult strain monitoring, etc., and achieve easy array batch Manufacturing, process conditions are mild and controllable, and the effect of increasing sensitivity

Active Publication Date: 2021-12-24
BEIHANG UNIV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of them are difficult to balance sensitivity and range, especially it is difficult to achieve a high sensitivity response to small strains while maintaining a wide linear sensing range
[0005] CN105783695 discloses a method for preparing a graphene composite nano-gold film flexible strain sensor, but because its graphene layer is a continuous structure prepared by CVD method, the sensing gain effect formed by compounding with gold nano-layer is not obvious, and the sensor Poor linearity, difficult to apply to actual strain monitoring

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Crack flexible strain sensor based on graphene-gold composite film and preparation method
  • Crack flexible strain sensor based on graphene-gold composite film and preparation method
  • Crack flexible strain sensor based on graphene-gold composite film and preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] In this embodiment, the process flow of the preparation method of the flexible strain sensor based on the graphene-gold composite film crack is as follows figure 1 , which includes the following steps:

[0042] Step S1: Prepare the electrode mask and the sensing unit mask, and then sputter-deposit metal electrodes on the flexible substrate covered with the electrode mask by magnetron sputtering, and remove the electrode mask after completion , and align the mask plate of the sensing unit and cover it on the flexible substrate, and place the covered flexible substrate on the bottom of the container filled with deionized water; in this embodiment, laser cutting can be used The electrode mask and the sensing unit mask are prepared on the metal mask by method or chemical etching. The line width of the electrode pattern of the electrode mask is 1mm, and the size of the sensing unit pattern of the sensing unit mask is 5mm×5mm.

[0043]Step S2: Weighing 30 mg of graphene by ...

Embodiment 2

[0049] Repeat the preparation process method in embodiment 1 to obtain as figure 2 The flexible strain sensor shown. Fix the prepared flexible strain sensor on the micro-motion stage through the clamp, apply 1% to 15% cyclic tensile strain to the flexible strain sensor through the micro-motion stage, and connect the metal electrode of the flexible strain sensor to the digital source meter , Measure the change of its resistance value and store the data with computer software. The obtained resistance change curve caused by the strain in the time domain, such as Figure 4 shown. This set of signal curves shows that the flexible strain sensor based on the graphene-gold composite film crack has high sensitivity (GF>130) and repeatable measurement capability. Further processing the obtained strain-resistance curve, such as Figure 5 shown. The curve shows that the flexible strain sensor based on the graphene-gold composite film crack maintains good linearity (R 2 ~0.9971).

Embodiment 3

[0051] Repeat the preparation process method in embodiment 1 to obtain as figure 2 The flexible strain sensor shown. The prepared flexible strain sensor is fixed on the micro-motion stage through the clamp, and the strain sensor is cyclically applied and released 1% of the tensile strain by the micro-motion stage for 1500 times. At the same time, the metal electrode of the flexible strain sensor is connected to the digital source meter. Measure the change of its resistance value and store the data with computer software. The resulting cyclic strain-resistance curve, such as Image 6 shown. This curve demonstrates the good stability of the flexible strain sensor based on cracks in the graphene-gold composite film under cyclic strain conditions.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
concentrationaaaaaaaaaa
Login to View More

Abstract

The invention discloses a graphene-gold composite film crack flexible strain sensor and a preparation method thereof. The preparation method includes: preparing a metal electrode on a PDMS flexible substrate by a mask method; using a liquid surface self-assembly method to form a quasi-continuous graphene film; the graphene film was transferred to the flexible substrate covering the mask of the sensing unit by the pulling method; the graphene-gold composite film was prepared by magnetron sputtering nano-gold on the surface of the graphene; the PDMS flexible substrate was pre-stretched The graphene-gold composite film is stretched to generate an initial crack, that is, a flexible strain sensor based on the crack of the graphene-gold composite film is obtained. The invention has mild process conditions, is easy to be fabricated in batches in an array, and the prepared sensor has both high sensitivity and a large linear range, and the sensitivity can be increased by a method of patterning a mask, which is suitable for integration in a sensing system. Strain measurement over a wide range.

Description

technical field [0001] The invention relates to the technical field of strain sensor preparation, in particular to a flexible strain sensor based on graphene-gold composite film cracks and a preparation method. Background technique [0002] The piezoresistive strain sensor uses the "strain-resistance effect" to convert the local deformation of the measured surface into the resistance value change of the conductive path in the sensor that can be measured intuitively. With the current development of nanomaterials, more and more scholars have paid attention to the research of flexible strain sensors based on nano-films. This new sensor consists of a flexible substrate, nano-functional films and electrode leads. Compared with traditional strain gauges and grating strain sensors, flexible film strain sensors have significant advantages such as strong conformability, strong biocompatibility, light weight, and good stretchability, so more and more applications Human-computer inter...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/16
CPCG01B7/18
Inventor 蔡军程翔徐嘉华张德远
Owner BEIHANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products