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Crack flexible strain sensor based on graphene-gold composite film and preparation method

A technology of strain sensor and composite thin film, applied in the direction of electric/magnetic solid deformation measurement, electromagnetic measurement device, etc., can solve the problems of variable height sensitive response, wide linear sensing range, and insignificant sensing gain effect

Active Publication Date: 2021-07-06
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of them are difficult to balance sensitivity and range, especially it is difficult to achieve a high sensitivity response to small strains while maintaining a wide linear sensing range
[0005] CN105783695 discloses a method for preparing a graphene composite nano-gold film flexible strain sensor, but because its graphene layer is a continuous structure prepared by CVD method, the sensing gain effect formed by compounding with gold nano-layer is not obvious, and the sensor Poor linearity, difficult to apply to actual strain monitoring

Method used

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  • Crack flexible strain sensor based on graphene-gold composite film and preparation method
  • Crack flexible strain sensor based on graphene-gold composite film and preparation method
  • Crack flexible strain sensor based on graphene-gold composite film and preparation method

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Embodiment 1

[0041] In this embodiment, the process flow of the preparation method of the flexible strain sensor based on the graphene-gold composite film crack is as follows figure 1 , which includes the following steps:

[0042] Step S1: Prepare the electrode mask and the sensing unit mask, and then sputter-deposit metal electrodes on the flexible substrate covered with the electrode mask by magnetron sputtering, and remove the electrode mask after completion , and align the mask plate of the sensing unit and cover it on the flexible substrate, and place the covered flexible substrate on the bottom of the container filled with deionized water; in this embodiment, laser cutting can be used The electrode mask and the sensing unit mask are prepared on the metal mask by method or chemical etching. The line width of the electrode pattern of the electrode mask is 1mm, and the size of the sensing unit pattern of the sensing unit mask is 5mm×5mm.

[0043]Step S2: Weighing 30 mg of graphene by ...

Embodiment 2

[0049] Repeat the preparation process method in embodiment 1 to obtain as figure 2 The flexible strain sensor shown. Fix the prepared flexible strain sensor on the micro-motion stage through the clamp, apply 1% to 15% cyclic tensile strain to the flexible strain sensor through the micro-motion stage, and connect the metal electrode of the flexible strain sensor to the digital source meter , Measure the change of its resistance value and store the data with computer software. The obtained resistance change curve caused by the strain in the time domain, such as Figure 4 shown. This set of signal curves shows that the flexible strain sensor based on the graphene-gold composite film crack has high sensitivity (GF>130) and repeatable measurement capability. Further processing the obtained strain-resistance curve, such as Figure 5 shown. The curve shows that the flexible strain sensor based on the graphene-gold composite film crack maintains good linearity (R 2 ~0.9971).

Embodiment 3

[0051] Repeat the preparation process method in embodiment 1 to obtain as figure 2 The flexible strain sensor shown. The prepared flexible strain sensor is fixed on the micro-motion stage through the clamp, and the strain sensor is cyclically applied and released 1% of the tensile strain by the micro-motion stage for 1500 times. At the same time, the metal electrode of the flexible strain sensor is connected to the digital source meter. Measure the change of its resistance value and store the data with computer software. The resulting cyclic strain-resistance curve, such as Image 6 shown. This curve demonstrates the good stability of the flexible strain sensor based on cracks in the graphene-gold composite film under cyclic strain conditions.

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Abstract

The invention discloses a crack flexible strain sensor based on a graphene-gold composite film and a preparation method thereof. The preparation method comprises the following steps of preparing a metal electrode on a PDMS flexible substrate through a mask method, forming a quasi-continuous graphene film by using a liquid level self-assembly method, transferring the graphene film to a flexible substrate covering the sensing unit mask through a pulling method, performing magnetron sputtering of nanogold on the surface of the graphene to prepare a graphene-gold composite film, and pre-stretching the PDMS flexible substrate to enable the graphene-gold composite film to generate an initial crack, thereby obtaining the flexible strain sensor based on the graphene-gold composite film crack. The process conditions are mild, array batch manufacturing is easy, the prepared sensor has high sensitivity and a large linear range, the sensitivity can be improved through a mask patterning method, and the sensor is suitable for being integrated in a sensing system to complete strain measurement in a wide range.

Description

technical field [0001] The invention relates to the technical field of strain sensor preparation, in particular to a flexible strain sensor based on graphene-gold composite film cracks and a preparation method. Background technique [0002] The piezoresistive strain sensor uses the "strain-resistance effect" to convert the local deformation of the measured surface into the resistance value change of the conductive path in the sensor that can be measured intuitively. With the current development of nanomaterials, more and more scholars have paid attention to the research of flexible strain sensors based on nano-films. This new sensor consists of a flexible substrate, nano-functional films and electrode leads. Compared with traditional strain gauges and grating strain sensors, flexible film strain sensors have significant advantages such as strong conformability, strong biocompatibility, light weight, and good stretchability, so more and more applications Human-computer inter...

Claims

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Application Information

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IPC IPC(8): G01B7/16
CPCG01B7/18
Inventor 蔡军程翔徐嘉华张德远
Owner BEIHANG UNIV
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