A kind of titanium-nickel shape memory alloy target and preparation method thereof
A memory alloy, titanium-nickel technology, applied in the field of shape memory alloy target preparation, can solve the problems of poor effect, complicated operation and high processing cost, and achieve the effect of reducing temperature, high target material purity and low impurity content
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Embodiment 1
[0036] An embodiment of a titanium-nickel shape memory alloy target of the present invention is specifically as follows:
[0037] (1) Add metallic titanium and metallic nickel into the crucible of the maglev smelting furnace in an alternately tiling manner, vacuum the maglev smelting furnace, fill the furnace with argon gas washing, and after evacuating again, fill with new argon gas into the furnace The air pressure is 2.0×10 -2 Pa, then the temperature is heated to 1350°C in 6min, and smelted for 6min to obtain an alloy melt; the mass ratio of the metal titanium and the metal nickel is 4:6;
[0038] (2) The alloy melt is cast into a water-cooled carbon steel mold within 10s, and the water-cooled carbon steel mold is filled with cooling water of 10°C, so that the alloy melt is cooled from bottom to top for 2 hours to obtain a target blank;
[0039] (3) The titanium-nickel shape memory alloy target is obtained after machining the target blank.
[0040] figure 1 and figure...
Embodiment 2
[0044] An embodiment of a titanium-nickel shape memory alloy target of the present invention is specifically as follows:
[0045] (1) Add metallic titanium and metallic nickel into the crucible of the maglev smelting furnace in an alternately tiling manner, vacuum the maglev smelting furnace, fill the furnace with argon gas washing, and after evacuating again, fill with new argon gas into the furnace The air pressure is 2.0×10 -2 Pa, the temperature was heated to 1360°C in 7min, and the alloy melt was obtained by smelting for 8min; the mass ratio of the metal titanium and the metal nickel was 4:6;
[0046] (2) The alloy melt is cast into a water-cooled carbon steel mold within 10s, and the water-cooled carbon steel mold is filled with cooling water of 10°C, so that the alloy melt is cooled from bottom to top for 2 hours to obtain a target blank;
[0047] (3) The titanium-nickel shape memory alloy target is obtained after machining the target blank.
[0048] The titanium-nick...
Embodiment 3
[0050]An embodiment of a titanium-nickel shape memory alloy target of the present invention is specifically as follows:
[0051] (1) Add metallic titanium and metallic nickel into the crucible of the maglev smelting furnace in an alternately tiling manner, vacuum the maglev smelting furnace, fill the furnace with argon gas washing, and after evacuating again, fill with new argon gas into the furnace The air pressure is 2.0×10 -2 Pa, the temperature is heated to 1350 ℃ in 6min and smelted for 4min to obtain an alloy melt; the mass ratio of the metal titanium and the metal nickel is 4:6;
[0052] (2) The alloy melt is cast into a water-cooled carbon steel mold within 10s, and the water-cooled carbon steel mold is filled with cooling water of 10°C, so that the alloy melt is cooled from bottom to top for 2 hours to obtain a target blank;
[0053] (3) The titanium-nickel shape memory alloy target is obtained after machining the target blank.
[0054] The titanium-nickel shape mem...
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