Flexible humidity sensor and preparation method thereof

Abstract

The invention discloses a flexible humidity sensor based on hydrophobic porous polytetrafluoroethylene isolation and protection and a preparation method thereof. The sensor comprises a hydrophobic porous polytetrafluoroethylene substrate, a metal electrode layer, a hydrophobic porous polytetrafluoroethylene isolation layer, a graphene oxide sensitive layer and a hydrophobic porous polytetrafluoroethylene material protection layer from bottom to top. According to the humidity sensor, the insulated hydrophobic porous polytetrafluoroethylene layer is arranged between the metal electrode layer and the humidity-sensitive material layer, so that the capacitance loss of a device under high humidity can be effectively reduced, and in addition, the hydrophobic porous polytetrafluoroethylene material protection layer is arranged on the outermost layer, the humidity sensor is waterproof, antifouling and good in air permeability, and the performance of the device is not influenced.

Description

technical field [0001] The invention relates to the technical field of semiconductor technology, in particular to a flexible humidity sensor and a preparation process thereof. Background technique [0002] Humidity is a common environmental parameter in life, and humidity sensors are widely used in meteorology, semiconductors, food processing, and medical treatment. The capacitive humidity sensor has been studied by many scholars for its low power consumption, high performance and long-term stability. However, the leakage loss in the dielectric material will increase the total power consumption of the device and reduce the performance of the device. On the other hand, the humidity sensitive material Surface contamination can also rapidly degrade the sensitive characteristics of the device. [0003] In 2005, Jing Wang and others prepared a capacitive humidity sensor with nano-barium titanate as the sensitive material. The test results showed that there will be dielectric los...

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Problems solved by technology

The capacitive humidity sensor has been studied by many scholars for its low power consumption, high performance and long-term stability. However, the leakage loss in the dielectric material will increase the total power consumption of the device and reduce the performance of the device. On the other hand, the humidity of the humidity-sensitive material Surface contamination will also rapidly degrade the sensitive characteristics of the device

[0003] In 2005, Jing Wang and others prepared a capacitive humidity sensor with nano-barium titanate as the sensitive material. The test results showed that there will be dielectric loss in almost all relative humidity ranges. With the increase of relative humidity, the dielectric loss will decrease. The peak will move to the high frequency direction, and the sensor has no protective layer, and the moisture sensitive layer is easily polluted

In order to protect the moisture-sensitive layer from pollution and prevent water vapor from condensing on the moisture-sensitive layer under high humidity, they formed a protective layer on the moisture-sensitive layer by spin-coating ethyl cellulose ethyl acetate solution, but this protective layer also Has a certain degree of water absorption, which will affect the moisture-sensing characteristics of the device

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